Inventor · disambiguated record
Reiner Garreis
Also filed as: GARREIS REINER
5 granted patents·110 citations·filing 2003–2007
82Inventor score
Top patents by PatentIndex Score
5 records- 0194US7209292B2Projection objective, especially for microlithography, and method for adjusting a projection objectiveZEISS CARL SMT AG·Filed 2003·Granted Apr 24, 2007·56 cites·99 claims
- 0287US7310187B2Projection objective, especially for microlithography, and method for adjusting a projection objectiveZEISS CARL SMT AG·Filed 2007·Granted Dec 18, 2007·8 cites·32 claims
- 0385US6806942B2Projection exposure systemZEISS CARL SMT AG·Filed 2003·Granted Oct 19, 2004·32 cites·39 claims
- 0473US8605257B2Projection system with compensation of intensity variations and compensation element thereforPAZIDIS ALEXANDRA·Filed 2005·Granted Dec 10, 2013·7 cites·45 claims
- 0573US7079331B2Device for holding a beam splitter elementZEISS CARL SMT AG·Filed 2005·Granted Jul 18, 2006·7 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →