Inventor · disambiguated record
Rei Ibuka
Also filed as: IBUKA REI
3 granted patents·0 citations·filing 2019–2022
39Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0146US12266514B2Substrate processing apparatus and substrate temperature correction methodTOKYO ELECTRON LTD·Filed 2022·Granted Apr 1, 2025·0 cites·15 claims
- 0245US10867777B2Plasma processing method and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2019·Granted Dec 15, 2020·0 cites·20 claims
- 0339US10784088B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Sep 22, 2020·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →