Inventor · disambiguated record
Reiner Maria Jungblut
Also filed as: JUNGBLUT REINER M · JUNGBLUT REINER MARIA
18 granted patents·1 pending application·75 citations·filing 1998–2022
92Inventor score
Top patents by PatentIndex Score
19 records- 0195US10133191B2Method for determining a process window for a lithographic process, associated apparatuses and a computer programASML NETHERLANDS BV·Filed 2015·Granted Nov 20, 2018·8 cites·20 claims
- 0294US10990018B2Computational metrologyASML NETHERLANDS BV·Filed 2018·Granted Apr 27, 2021·10 cites·20 claims
- 0392US10274849B2Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Apr 30, 2019·5 cites·20 claims
- 0491US11347150B2Computational metrologyASML NETHERLANDS BV·Filed 2021·Granted May 31, 2022·2 cites·22 claims
- 0591US10558130B2Methods for controlling lithographic apparatus, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Feb 11, 2020·4 cites·22 claims
- 0690US10996176B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2020·Granted May 4, 2021·2 cites·19 claims
- 0789US10317191B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2017·Granted Jun 11, 2019·4 cites·21 claims
- 0885US10746668B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2019·Granted Aug 18, 2020·2 cites·27 claims
- 0983US9594029B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2012·Granted Mar 14, 2017·4 cites·16 claims
- 1082US10324379B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Jun 18, 2019·3 cites·14 claims
- 1174US11977034B2Methods and apparatus for measuring a property of a substrateASML NETHERLANDS BV·Filed 2021·Granted May 7, 2024·0 cites·18 claims
- 1272US10545410B2Lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program productASML NETHERLANDS BV·Filed 2017·Granted Jan 28, 2020·1 cites·20 claims
- 1371US12189302B2Computational metrologyASML NETHERLANDS BV·Filed 2022·Granted Jan 7, 2025·0 cites·22 claims
- 1463US8263296B2Lithographic apparatus and device manufacturing methodHINNEN PAUL CHRISTIAAN·Filed 2010·Granted Sep 11, 2012·1 cites·9 claims
- 1559US6101298AOptical switching devicePHILIPS CORP·Filed 1998·Granted Aug 8, 2000·29 cites·9 claims
- 1652US11126093B2Focus and overlay improvement by modifying a patterning deviceASML NETHERLANDS BV·Filed 2017·Granted Sep 21, 2021·0 cites·20 claims
- 1749US9217916B2Lithographic apparatus and device manufacturing methodHINNEN PAUL CHRISTIAAN·Filed 2012·Granted Dec 22, 2015·0 cites·14 claims
- 1844US7903234B2Lithographic apparatus, device manufacturing method and computer program productASML NETHERLANDS BV·Filed 2007·Granted Mar 8, 2011·0 cites·14 claims
- 1936US2011028004A1Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →