Inventor · disambiguated record
Richard A. Burgie
Also filed as: BURGIE RICHARD A · BURGIE RICHARD ANTHONY
5 granted patents·223 citations·filing 1991–1994
84Inventor score
Top patents by PatentIndex Score
5 records- 0188US5906799AChlorosilane and hydrogen reactorHEMLOCK SEMICONDUCTOR CORP·Filed 1992·Granted May 25, 1999·103 cites·21 claims
- 0278US5422088AProcess for hydrogenation of tetrachlorosilaneHEMLOCK SEMICONDUCTOR CORP·Filed 1994·Granted Jun 6, 1995·47 cites·7 claims
- 0370US5126112AGraphite and carbon felt insulating system for chlorosilane and hydrogen reactorHEMLOCK SEMICONDUCTOR CORP·Filed 1991·Granted Jun 30, 1992·30 cites·15 claims
- 0462US5118486ASeparation by atomization of by-product stream into particulate silicon and silanesHEMLOCK SEMICONDUCTOR CORP·Filed 1991·Granted Jun 2, 1992·25 cites·21 claims
- 0554US5401872ATreatment of vent gas to remove hydrogen chlorideHEMLOCK SEMICONDUCTOR·Filed 1994·Granted Mar 28, 1995·18 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →