Inventor · disambiguated record
Richard G. Morton
Also filed as: MORTON RICHARD · MORTON RICHARD G · MORTON RICHARD GEORGE · WARKENTIN DAVID J
54 granted patents·2 pending applications·2,428 citations·filing 1976–2018
99Inventor score
Files withCYMER INC42JERSEY NUCLEAR AVCO ISOTOPES4MORTON RICHARD G3MAXWELL LAB2AVCO EVERETT RES LAB INC1
Top patents by PatentIndex Score
56 records- 0199US6067311AExcimer laser with pulse multiplierCYMER INC·Filed 1998·Granted May 23, 2000·224 cites·13 claims
- 0298US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 0398US6018537AReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 1999·Granted Jan 25, 2000·280 cites·37 claims
- 0498US5771258AAerodynamic chamber design for high pulse repetition rate excimer lasersCYMER INC·Filed 1997·Granted Jun 23, 1998·187 cites·14 claims
- 0597US6414979B2Gas discharge laser with blade-dielectric electrodeCYMER INC·Filed 2001·Granted Jul 2, 2002·173 cites·17 claims
- 0695US7068697B1Adjustable flow guide to accommodate electrode erosion in a gas discharge laserCYMER INC·Filed 2005·Granted Jun 27, 2006·30 cites·21 claims
- 0795US6904073B2High power deep ultraviolet laser with long life opticsCYMER INC·Filed 2003·Granted Jun 7, 2005·78 cites·87 claims
- 0893US6584132B2Spinodal copper alloy electrodesCYMER INC·Filed 2001·Granted Jun 24, 2003·43 cites·7 claims
- 0993US5978409ALine narrowing apparatus with high transparency prism beam expanderCYMER INC·Filed 1998·Granted Nov 2, 1999·104 cites·14 claims
- 1092USRE38054EReliable, modular, production quality narrow-band high rep rate F2 laserCYMER INC·Filed 2001·Granted Apr 1, 2003·42 cites·37 claims
- 1192US6466602B1Gas discharge laser long life electrodesCYMER INC·Filed 2000·Granted Oct 15, 2002·69 cites·31 claims
- 1292US6277079B1Flashing earring heartbeat monitorFiled 2000·Granted Aug 21, 2001·57 cites·11 claims
- 1390US6330261B1Reliable, modular, production quality narrow-band high rep rate ArF excimer laserCYMER INC·Filed 1999·Granted Dec 11, 2001·105 cites·44 claims
- 1489US6560263B1Discharge laser having electrodes with sputter cavities and discharge peaksCYMER INC·Filed 2000·Granted May 6, 2003·35 cites·36 claims
- 1589US4739406AMethod and apparatus for interacting with television imagesMORTON RICHARD G·Filed 1986·Granted Apr 19, 1988·77 cites·3 claims
- 1688US6314119B1Excimer laser with pulse and beam multiplierCYMER INC·Filed 1998·Granted Nov 6, 2001·62 cites·11 claims
- 1788US4325006AHigh pulse repetition rate coaxial flashlampJERSEY NUCLEAR AVCO ISOTOPES·Filed 1979·Granted Apr 13, 1982·25 cites·9 claims
- 1886US7819945B2Metal fluoride trapCYMER INC·Filed 2008·Granted Oct 26, 2010·10 cites·18 claims
- 1985US6034978AGas discharge laser with gas temperature controlCYMER INC·Filed 1999·Granted Mar 7, 2000·70 cites·28 claims
- 2085US4975918ATunable laserMAXWELL LAB·Filed 1989·Granted Dec 4, 1990·34 cites·28 claims
- 2184US5999318AReflective overcoat for replicated diffraction gratingsCYMER INC·Filed 1999·Granted Dec 7, 1999·80 cites·8 claims
- 2284US4289397ALaser ceilometer signal processing meansAVCO EVERETT RES LAB INC·Filed 1979·Granted Sep 15, 1981·40 cites·20 claims
- 2383US7535948B2Cathodes for fluorine gas discharge lasersCYMER INC·Filed 2006·Granted May 19, 2009·7 cites·26 claims
- 2483US4176324AHigh performance dye laser and flow channel thereforJERSEY NUCLEAR AVCO ISOTOPES·Filed 1976·Granted Nov 27, 1979·29 cites·12 claims
- 2580US6654403B2Flow shaping electrode with erosion pad for gas discharge laserCYMER INC·Filed 2000·Granted Nov 25, 2003·16 cites·9 claims
- 2680US6529321B2Protective overcoat for replicated diffraction gratingsCYMER INC·Filed 2000·Granted Mar 4, 2003·19 cites·3 claims
- 2779US7706424B2Gas discharge laser system electrodes and power supply for delivering electrical energy to sameCYMER INC·Filed 2005·Granted Apr 27, 2010·6 cites·15 claims
- 2879US6363094B1Gas discharge laser electrode with reduced sensitivity to adverse boundary layer effectsCYMER INC·Filed 2000·Granted Mar 26, 2002·17 cites·19 claims
- 2978US6690706B2High rep-rate laser with improved electrodesCYMER INC·Filed 2002·Granted Feb 10, 2004·17 cites·30 claims
- 3073US6511703B2Protective overcoat for replicated diffraction gratingsCYMER INC·Filed 2001·Granted Jan 28, 2003·14 cites·9 claims
- 3171US6711202B2Discharge laser with porous insulating layer covering anode discharge surfaceCYMER INC·Filed 2001·Granted Mar 23, 2004·8 cites·22 claims
- 3268US7522650B2Gas discharge laser chamber improvementsCYMER INC·Filed 2004·Granted Apr 21, 2009·8 cites·64 claims
- 3367US6937635B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Aug 30, 2005·7 cites·16 claims
- 3466US6058739ALong life fused silica ultraviolet optical elementsCYMER INC·Filed 1998·Granted May 9, 2000·26 cites·7 claims
- 3565US4423511AUnstable waveguide laser resonatorJERSEY NUCLEAR AVCO ISOTOPES·Filed 1981·Granted Dec 27, 1983·14 cites·16 claims
- 3664US7346093B2DUV light source optical element improvementsCYMER INC·Filed 2004·Granted Mar 18, 2008·8 cites·46 claims
- 3764US6914927B2Laser discharge chamber passivation by plasmaCYMER INC·Filed 2003·Granted Jul 5, 2005·5 cites·14 claims
- 3863US6162495AProtective overcoat for replicated diffraction gratingsCYMER INC·Filed 1997·Granted Dec 19, 2000·22 cites·9 claims
- 3963US4897726AMethod and apparatus for interacting with television imagesMORTON RICHARD G·Filed 1988·Granted Jan 30, 1990·19 cites·5 claims
- 4061US6644324B1Laser discharge chamber passivation by plasmaCYMER INC·Filed 2000·Granted Nov 11, 2003·4 cites·19 claims
- 4160US4868768AOptical absorption measurement systemUS ENERGY·Filed 1986·Granted Sep 19, 1989·22 cites·11 claims
- 4259US7301980B2Halogen gas discharge laser electrodesCYMER INC·Filed 2004·Granted Nov 27, 2007·5 cites·82 claims
- 4356US7095774B2Cathodes for fluorine gas discharge lasersCYMER INC·Filed 2003·Granted Aug 22, 2006·3 cites·10 claims
- 4455US7132123B2High rep-rate laser with improved electrodesCYMER INC·Filed 2003·Granted Nov 7, 2006·3 cites·5 claims
- 4555US4178565AFluid laser flow channel linerJERSEY NUCLEAR AVCO ISOTOPES·Filed 1977·Granted Dec 11, 1979·8 cites·17 claims
- 4654US7046713B2Discharge laser with porous layer covering anode discharge surfaceCYMER INC·Filed 2003·Granted May 16, 2006·2 cites·72 claims
- 4754US5126621ARuggedized flashlamp exhibiting high average power and long lifeMAXWELL LAB·Filed 1991·Granted Jun 30, 1992·12 cites·23 claims
- 4850US7339973B2Electrodes for fluorine gas discharge lasersCYMER INC·Filed 2003·Granted Mar 4, 2008·2 cites·36 claims
- 4949US7230965B2Anodes for fluorine gas discharge lasersCYMER INC·Filed 2003·Granted Jun 12, 2007·1 cites·28 claims
- 5048US7190708B2Annealed copper alloy electrodes for fluorine containing gas discharge lasersCYMER INC·Filed 2000·Granted Mar 13, 2007·1 cites·13 claims
Showing the top 50 of 56 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →