Inventor · disambiguated record
Richard Muh
Also filed as: MUH RICHARD · MUH RICHARD C
2 granted patents·170 citations·filing 1991–1994
69Inventor score
Files withAPPLIED MATERIALS INC2
Top patents by PatentIndex Score
2 records- 0194US5507874AMethod of cleaning of an electrostatic chuck in plasma reactorsAPPLIED MATERIALS INC·Filed 1994·Granted Apr 16, 1996·131 cites·24 claims
- 0259US5220515AFlow verification for process gas in a wafer processing system apparatus and methodAPPLIED MATERIALS INC·Filed 1991·Granted Jun 15, 1993·39 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →