Inventor · disambiguated record
Richard Phillips
Also filed as: PHILLIPS RICHARD · PHILLIPS RICHARD S · PHILLIPS RICHARD STEPHEN
14 granted patents·5 pending applications·164 citations·filing 1989–2024
92Inventor score
Top patents by PatentIndex Score
19 records- 0197US10269559B2Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layerLAM RES CORP·Filed 2017·Granted Apr 23, 2019·28 cites·20 claims
- 0293US10629435B2Doped ALD films for semiconductor patterning applicationsLAM RES CORP·Filed 2016·Granted Apr 21, 2020·9 cites·17 claims
- 0392US10403474B2Collar, conical showerheads and/or top plates for reducing recirculation in a substrate processing systemLAM RES CORP·Filed 2016·Granted Sep 3, 2019·10 cites·10 claims
- 0491US10658172B2Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layerLAM RES CORP·Filed 2019·Granted May 19, 2020·7 cites·21 claims
- 0587US11286560B2Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matchingLAM RES CORP·Filed 2020·Granted Mar 29, 2022·2 cites·20 claims
- 0684US6408440B1Protective vestFiled 2000·Granted Jun 25, 2002·38 cites·14 claims
- 0784US2025019825A1Pedestals for modulating film properties in atomic layer deposition (ald) substrate processing chambersLAM RES CORP·Filed 2024·Application pending·0 cites
- 0881US10697059B2Thickness compensation by modulation of number of deposition cycles as a function of chamber accumulation for wafer to wafer film thickness matchingLAM RES CORP·Filed 2017·Granted Jun 30, 2020·3 cites·15 claims
- 0978US10431451B2Methods and apparatuses for increasing reactor processing batch sizeLAM RES CORP·Filed 2017·Granted Oct 1, 2019·2 cites·20 claims
- 1074US10840061B2Substrate processing chamber including conical surface for reducing recirculationLAM RES CORP·Filed 2019·Granted Nov 17, 2020·1 cites·13 claims
- 1168US12110586B2Pedestals for modulating film properties in atomic layer deposition (ALD) substrate processing chambersLAM RES CORP·Filed 2020·Granted Oct 8, 2024·0 cites·13 claims
- 1263US5306970ASense amplifier and method for its operationNORTHERN TELECOM LTD·Filed 1992·Granted Apr 26, 1994·17 cites·19 claims
- 1358US5903490ACustomizable integrated circuit deviceCHIP EXPRESS ISRAEL LTD·Filed 1996·Granted May 11, 1999·18 cites·28 claims
- 1457US5187429AReference voltage generator for dynamic random access memoryNORTHERN TELECOM LTD·Filed 1992·Granted Feb 16, 1993·19 cites·9 claims
- 1555US2022228263A1Independently adjustable flowpath conductance in multi-station semiconductor processingLAM RES CORP·Filed 2020·Application pending·0 cites
- 1654US5148165ACMOS digital to analog signal converter circuitMOSAID INC·Filed 1989·Granted Sep 15, 1992·10 cites·7 claims
- 1746US2003039819A1Protective vestFiled 2002·Application pending·0 cites
- 1838US2018334746A1Wafer Edge Contact Hardware and Methods to Eliminate Deposition at Wafer Backside Edge and NotchLAM RES CORP·Filed 2017·Application pending·0 cites
- 1931US2017098471A1Methods and apparatuses for low power static random access memory (sram) cell and array architecture for above, near and below threshold voltage operationPHILLIPS RICHARD·Filed 2016·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →