Inventor · disambiguated record
Richard Quintanilha
Also filed as: QUINTANILHA RICHARD
21 granted patents·65 citations·filing 2012–2023
93Inventor score
Top patents by PatentIndex Score
21 records- 0195US10146140B2Methods and apparatus for simulating interaction of radiation with structures, metrology methods and apparatus, device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Dec 4, 2018·8 cites·13 claims
- 0293US9563131B2Lithographic apparatus, substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Feb 7, 2017·5 cites·9 claims
- 0392US9261772B2Lithographic apparatus, substrate and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Feb 16, 2016·9 cites·29 claims
- 0491US10222709B2Metrology method, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Mar 5, 2019·5 cites·20 claims
- 0590US10342108B2Metrology methods, radiation source, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jul 2, 2019·5 cites·20 claims
- 0689US9915879B2Substrate and patterning device for use in metrology, metrology method and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 13, 2018·4 cites·14 claims
- 0787US10067074B2Metrology methods, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Sep 4, 2018·6 cites·22 claims
- 0885US9904181B2Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Feb 27, 2018·4 cites·18 claims
- 0985US9823586B2Inspection apparatus, inspection method and manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Nov 21, 2017·6 cites·21 claims
- 1082US10976265B2Optical detectorASML NETHERLANDS BV·Filed 2018·Granted Apr 13, 2021·2 cites·20 claims
- 1182US10101671B2Metrology methods, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Oct 16, 2018·2 cites·20 claims
- 1281US10254644B2Metrology methods, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Apr 9, 2019·2 cites·18 claims
- 1380US12326407B2Inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2023·Granted Jun 10, 2025·0 cites·20 claims
- 1476US11442368B2Inspection tool, inspection method and computer program productASML NETHERLANDS BV·Filed 2019·Granted Sep 13, 2022·1 cites·20 claims
- 1576US10036962B2Inspection apparatus and methods, lithographic system and device manufacturing methodASML NETHERLANDS BV·Filed 2014·Granted Jul 31, 2018·2 cites·19 claims
- 1675US8876346B2Illumination source for use in inspection methods and/or lithography; inspection and lithographic apparatus and inspection methodQUINTANILHA RICHARD·Filed 2012·Granted Nov 4, 2014·3 cites·19 claims
- 1772US9632424B2Illumination source for use in inspection methods and/or lithography; inspection and lithographic apparatus and inspection methodASML NETHERLANDS BV·Filed 2014·Granted Apr 25, 2017·1 cites·22 claims
- 1868US11692948B2Inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2019·Granted Jul 4, 2023·0 cites·20 claims
- 1961US10555407B2Metrology methods, radiation source, metrology apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Feb 4, 2020·0 cites·23 claims
- 2056US11347151B2Methods and apparatus for calculating electromagnetic scattering properties of a structureASML NETHERLANDS BV·Filed 2019·Granted May 31, 2022·0 cites·15 claims
- 2154US10634490B2Determining edge roughness parametersASML NETHERLANDS BV·Filed 2018·Granted Apr 28, 2020·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →