Inventor · disambiguated record
Rintaro Takao
Also filed as: TAKAO RINTARO
3 granted patents·1 pending application·6 citations·filing 2013–2024
54Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0175US9920424B2Method of cleaning thin film forming apparatus, thin film forming method, thin film forming apparatus and non-transitory recording mediumTOKYO ELECTRON LTD·Filed 2013·Granted Mar 20, 2018·6 cites·4 claims
- 0252US2024393768A1Substrate processing apparatus, substrate processing method, and programTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0346US11621185B2Semiconductor manufacturing apparatus and method for transferring waferTOKYO ELECTRON LTD·Filed 2021·Granted Apr 4, 2023·0 cites·11 claims
- 0433US11152241B2Substrate processing apparatus and notification methodTOKYO ELECTRON LTD·Filed 2018·Granted Oct 19, 2021·0 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →