Inventor · disambiguated record
Richard A. Yarussi
Also filed as: YARUSSI RICHARD A
11 granted patents·436 citations·filing 1998–2011
92Inventor score
Top patents by PatentIndex Score
11 records- 0196US7372565B1Spectrometer measurement of diffracting structuresNANOMETRICS INC·Filed 2006·Granted May 13, 2008·46 cites·24 claims
- 0296US6522406B1Correcting the system polarization sensitivity of a metrology tool having a rotatable polarizerNANOMETRICS INC·Filed 2001·Granted Feb 18, 2003·119 cites·16 claims
- 0392US7115858B1Apparatus and method for the measurement of diffracting structuresNANOMETRICS INC·Filed 2000·Granted Oct 3, 2006·55 cites·16 claims
- 0491US6665070B1Alignment of a rotatable polarizer with a sampleNANOMETRICS INC·Filed 2001·Granted Dec 16, 2003·40 cites·27 claims
- 0584US6181427B1Compact optical reflectometer systemNANOMETRICS INC·Filed 1999·Granted Jan 30, 2001·70 cites·18 claims
- 0680US6320609B1System using a polar coordinate stage and continuous image rotation to compensate for stage rotationNANOMETRICS INC·Filed 1998·Granted Nov 20, 2001·50 cites·35 claims
- 0778US8259297B1Scanning focal length metrologyYARUSSI RICHARD A·Filed 2011·Granted Sep 4, 2012·5 cites·21 claims
- 0877US7289215B2Image control in a metrology/inspection positioning systemNANOMETRICS INC·Filed 2007·Granted Oct 30, 2007·7 cites·22 claims
- 0974US7697135B1Scanning focal length metrologyNANOMETRICS INC·Filed 2007·Granted Apr 13, 2010·6 cites·30 claims
- 1072US7295314B1Metrology/inspection positioning systemNANOMETRICS INC·Filed 1999·Granted Nov 13, 2007·38 cites·20 claims
- 1144US8259296B1Scanning focal length metrologyYARUSSI RICHARD A·Filed 2010·Granted Sep 4, 2012·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →