Inventor · disambiguated record
Robert George Begin
Also filed as: BEGIN ROBERT G · BEGIN ROBERT GEORGE
16 granted patents·706 citations·filing 1991–1999
95Inventor score
Files withSPUTTERED FILMS INC8APPLIED SCIENCE & TECH INC3SHAMROCK TECHNOLOGY CORP2APPLIED SCIENCE & TECHNOLOGY1BEGIN ROBERT GEORGE1
Top patents by PatentIndex Score
16 records- 0197US5310410AMethod for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatusSPUTTERED FILMS INC·Filed 1991·Granted May 10, 1994·500 cites·11 claims
- 0286US6149367AEnd effector assembly for inclusion in a system for producing uniform deposits on a waferAPPLIED SCIENCE & TECH INC·Filed 1998·Granted Nov 21, 2000·39 cites·5 claims
- 0382US5759268ASystem for providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1997·Granted Jun 2, 1998·42 cites·19 claims
- 0471US6117238AEnd effector assembly for inclusion in a system for producing uniform deposits on a waferAPPLIED SCIENCE & TECH INC·Filed 1996·Granted Sep 12, 2000·21 cites·5 claims
- 0570US5830272ASystem for and method of providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1995·Granted Nov 3, 1998·17 cites·33 claims
- 0669US6235172B1System for and method of providing a controlled deposition on wafersAPPLIED SCIENCE & TECHNOLOGY·Filed 1999·Granted May 22, 2001·21 cites·5 claims
- 0755US5858101ASystem providing a controlled deposition of wafersSPUTTERED FILMS INC·Filed 1997·Granted Jan 12, 1999·8 cites·14 claims
- 0854US6059517AEnd effector assembly for inclusion in a system for producing uniform deposits on a waferFiled 1998·Granted May 9, 2000·15 cites·6 claims
- 0951US6083357ASystem for and method of providing a controlled deposition on wafersAPPLIED SCIENCE & TECH INC·Filed 1997·Granted Jul 4, 2000·7 cites·18 claims
- 1051US5881668ASystem for providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1997·Granted Mar 16, 1999·7 cites·12 claims
- 1151US5868099APage clamping deviceBEGIN ROBERT GEORGE·Filed 1997·Granted Feb 9, 1999·17 cites·20 claims
- 1243US5879460ASystem for providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1997·Granted Mar 9, 1999·4 cites·13 claims
- 1339US6051066AEnd effector assembly for inclusion in a system for producing uniform deposits on a waferSPUTTERED FILMS INC·Filed 1998·Granted Apr 18, 2000·3 cites·5 claims
- 1437US6176987B1System for and method of providing a controlled deposition of wafersSHAMROCK TECHNOLOGY CORP·Filed 1997·Granted Jan 23, 2001·3 cites·6 claims
- 1532US5882403ASystem for providing a controlled deposition on wafersSPUTTERED FILMS INC·Filed 1997·Granted Mar 16, 1999·1 cites·12 claims
- 1629US6135051AEnd effector assembly for inclusion in a system for producing uniform deposits on a waferSHAMROCK TECHNOLOGY CORP·Filed 1998·Granted Oct 24, 2000·1 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →