Inventor · disambiguated record
Robert Buschlinger
Also filed as: BUSCHLINGER ROBERT
0 granted patents·2 pending applications·0 citations·filing 2024–2024
Technology areasG03F
Files withZEISS CARL SMT GMBH2
Top patents by PatentIndex Score
2 records- 0170US2025044703A1Method for measuring an illumination angle distribution on an object field and illumination optics unit having an illumination channel allocation intended thereforZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0268US2025044705A1Method for measuring the illumination pupil in a scanner taking into account a measurement reticleZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →