Inventor · disambiguated record
Robert A. Eaton
Also filed as: EATON ROBERT · EATON ROBERT A
9 granted patents·1 pending application·536 citations·filing 1974–2003
91Inventor score
Top patents by PatentIndex Score
10 records- 0195US6106662AMethod and apparatus for endpoint detection for chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 1998·Granted Aug 22, 2000·197 cites·35 claims
- 0294US6361646B1Method and apparatus for endpoint detection for chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 1999·Granted Mar 26, 2002·185 cites·12 claims
- 0386US6549279B2Method and apparatus for optical endpoint calibration in CMPSPEEDFAM IPEC CORP·Filed 2001·Granted Apr 15, 2003·37 cites·33 claims
- 0478US6960115B2Multiprobe detection system for chemical-mechanical planarization toolSPEEDFAM IPEC CORP·Filed 2003·Granted Nov 1, 2005·19 cites·24 claims
- 0576US6805613B1Multiprobe detection system for chemical-mechanical planarization toolSPEEDFAM IPEC CORP·Filed 2000·Granted Oct 19, 2004·17 cites·29 claims
- 0676US6395130B1Hydrophobic optical endpoint light pipes for chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 1999·Granted May 28, 2002·51 cites·6 claims
- 0757US6641462B2Method and apparatus for distributing fluid to a polishing surface during chemical mechanical polishingSPEEDFAM IPEC CORP·Filed 2001·Granted Nov 4, 2003·7 cites·16 claims
- 0852US3949133AHigh pressure assembly and laminateORCHARD CORP OF AMERICA·Filed 1974·Granted Apr 6, 1976·13 cites·18 claims
- 0935US2002145728A1Method and apparatus for a spectrally stable light source using white light LEDsSPEEDFAM IPEC CORP·Filed 2001·Application pending·0 cites
- 1034US5415493ASnow plow compatible speed bumpsUS ARMY·Filed 1994·Granted May 16, 1995·10 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →