Inventor · disambiguated record
Roger B. Fish
Also filed as: FISH ROGER · FISH ROGER B · FISH ROGER BRADFORD
25 granted patents·8 pending applications·94 citations·filing 1999–2024
94Inventor score
Files withAPPLIED MATERIALS INC7VARIAN SEMICONDUCTOR EQUIPMENT7VARIAN SEMICONDUCTOR EQUIPMENT ASS INC7FISH ROGER B6EATON CORP2
Top patents by PatentIndex Score
33 records- 0186US10704693B2Cryogenic ferrofluid sealed rotary unionVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jul 7, 2020·3 cites·18 claims
- 0286US9108322B2Force sensing system for substrate lifting apparatusVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Aug 18, 2015·9 cites·20 claims
- 0382US12232299B2Methods and apparatus for cooling a substrate supportAPPLIED MATERIALS INC·Filed 2022·Granted Feb 18, 2025·1 cites·20 claims
- 0478US7977652B2Optical heater for cryogenic ion implanter surface regenerationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2009·Granted Jul 12, 2011·4 cites·11 claims
- 0573US8328494B2In vacuum optical wafer heater for cryogenic processingFISH ROGER B·Filed 2009·Granted Dec 11, 2012·4 cites·19 claims
- 0670US9417138B2Gas coupled probe for substrate temperature measurementVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Aug 16, 2016·2 cites·20 claims
- 0769US6347919B1Wafer processing chamber having separable upper and lower halvesEATON CORP·Filed 1999·Granted Feb 19, 2002·35 cites·59 claims
- 0868US9163772B2Vacuum insulated cryogenic fluid transfer hoseFISH ROGER B·Filed 2012·Granted Oct 20, 2015·3 cites·11 claims
- 0968US8804288B2Technique for limiting transmission of fault currentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Aug 12, 2014·1 cites·10 claims
- 1067US9514916B2Wafer platen thermosyphon cooling systemVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2013·Granted Dec 6, 2016·2 cites·18 claims
- 1166US8020398B2Fluid delivery mechanism for vacuum wafer processing systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Sep 20, 2011·2 cites·14 claims
- 1264US8149256B2Techniques for changing temperature of a platenFISH ROGER B·Filed 2008·Granted Apr 3, 2012·2 cites·17 claims
- 1362US2025273425A1Air Bearing Shaft With Wide Operating Temperature RangeAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1461US12181054B2Linear actuated 3 way spool valve with constant total flowAPPLIED MATERIALS INC·Filed 2021·Granted Dec 31, 2024·0 cites·14 claims
- 1561US11631588B2Method and apparatus for non line-of-sight dopingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2020·Granted Apr 18, 2023·0 cites·20 claims
- 1661US2025125119A1Ion source with wire form metal dopantAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1761US2025201514A1Radiation Heating to Clean Deposits from Air Bearing ShaftAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1861US2025201510A1Radiation Heating to Dry Moisture from Air Bearing ShaftAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1960US2025210406A1Workpiece Support For Backside Processing Using Edge GripAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2059US6429139B1Serial wafer handling mechanismEATON CORP·Filed 1999·Granted Aug 6, 2002·23 cites·34 claims
- 2157US10541137B2Method and apparatus for non line-of-sight dopingVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2018·Granted Jan 21, 2020·0 cites·14 claims
- 2256US9391450B2Technique for limiting transmission of fault currentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Jul 12, 2016·0 cites·14 claims
- 2353US9530682B2System and apparatus for holding a substrate over wide temperature rangeVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Dec 27, 2016·0 cites·20 claims
- 2452US9212949B2Technique for temperature measurement and calibration of semiconductor workpieces using infraredVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted Dec 15, 2015·0 cites·20 claims
- 2550US8320088B2Power transfer mechanism for use in transmission and distribution level electrical power systemsFISH ROGER·Filed 2010·Granted Nov 27, 2012·1 cites·9 claims
- 2648US9338829B2Heated platen with improved temperature uniformityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2014·Granted May 10, 2016·0 cites·20 claims
- 2747US8467158B2Technique for limiting transmission of fault currentTEKLETSADIK KASEGN D·Filed 2010·Granted Jun 18, 2013·0 cites·14 claims
- 2847US6734439B2Wafer pedestal tilt mechanism and cooling systemFiled 2001·Granted May 11, 2004·2 cites·17 claims
- 2945US2010084117A1Platen cooling mechanism for cryogenic ion implantingFISH ROGER B·Filed 2008·Application pending·0 cites
- 3045US2009305489A1Multilayer electrostatic chuck wafer platenFISH ROGER B·Filed 2008·Application pending·0 cites
- 3142US10032601B2Platen support structureVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Jul 24, 2018·0 cites·14 claims
- 3240US8998269B2Vacuum insulated fitting enclosureFISH ROGER B·Filed 2012·Granted Apr 7, 2015·0 cites·20 claims
- 3335US2003070316A1Wafer pedestal tilt mechanism and cooling systemFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →