Inventor · disambiguated record
Robert B. Hagen
Also filed as: DELGADINO GERARDO A · HAGEN ROBERT B
8 granted patents·624 citations·filing 2001–2005
91Inventor score
Files withAPPLIED MATERIALS INC8
Top patents by PatentIndex Score
8 records- 0199US6900596B2Capacitively coupled plasma reactor with uniform radial distribution of plasmaAPPLIED MATERIALS INC·Filed 2002·Granted May 31, 2005·224 cites·53 claims
- 0298US6586886B1Gas distribution plate electrode for a plasma reactorAPPLIED MATERIALS INC·Filed 2001·Granted Jul 1, 2003·115 cites·46 claims
- 0396US7030335B2Plasma reactor with overhead RF electrode tuned to the plasma with arcing suppressionAPPLIED MATERIALS INC·Filed 2001·Granted Apr 18, 2006·72 cites·125 claims
- 0496US6894245B2Merie plasma reactor with overhead RF electrode tuned to the plasma with arcing suppressionAPPLIED MATERIALS INC·Filed 2001·Granted May 17, 2005·108 cites·31 claims
- 0590US7132618B2MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppressionAPPLIED MATERIALS INC·Filed 2003·Granted Nov 7, 2006·43 cites·35 claims
- 0689US7186943B2MERIE plasma reactor with overhead RF electrode tuned to the plasma with arcing suppressionAPPLIED MATERIALS INC·Filed 2005·Granted Mar 6, 2007·12 cites·20 claims
- 0787US6677712B2Gas distribution plate electrode for a plasma receptorAPPLIED MATERIALS INC·Filed 2003·Granted Jan 13, 2004·22 cites·14 claims
- 0885US6667577B2Plasma reactor with spoke antenna having a VHF mode with the spokes in phaseAPPLIED MATERIALS INC·Filed 2001·Granted Dec 23, 2003·28 cites·59 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →