Inventor · disambiguated record
Robert Matthew Kevwitch
Also filed as: KEVWITCH ROBERT · KEVWITCH ROBERT MATTHEW
13 granted patents·8 pending applications·183 citations·filing 2004–2016
93Inventor score
Files withSDCMATERIALS INC7TOKYO ELECTRON LTD7BIBERGER MAXIMILIAN A4JACOBSON GUNILLA2HILLMAN JOSEPH T1
Top patents by PatentIndex Score
21 records- 0198US9089840B2Method and system for forming plug and play oxide catalystsSDCMATERIALS INC·Filed 2013·Granted Jul 28, 2015·23 cites·12 claims
- 0297US9186663B2Method and system for forming plug and play metal compound catalystsSDCMATERIALS INC·Filed 2013·Granted Nov 17, 2015·19 cites·16 claims
- 0397US8507402B1Method and system for forming plug and play metal catalystsBIBERGER MAXIMILIAN A·Filed 2009·Granted Aug 13, 2013·25 cites·18 claims
- 0497US8481449B1Method and system for forming plug and play oxide catalystsBIBERGER MAXIMILIAN A·Filed 2007·Granted Jul 9, 2013·24 cites·13 claims
- 0596US8575059B1Method and system for forming plug and play metal compound catalystsBIBERGER MAXIMILIAN A·Filed 2007·Granted Nov 5, 2013·23 cites·19 claims
- 0696US8507401B1Method and system for forming plug and play metal catalystsBIBERGER MAXIMILIAN A·Filed 2007·Granted Aug 13, 2013·23 cites·15 claims
- 0794US9592492B2Method and system for forming plug and play oxide catalystsSDCMATERIALS INC·Filed 2015·Granted Mar 14, 2017·4 cites·14 claims
- 0892US7345000B2Method and system for treating a dielectric filmTOKYO ELECTRON LTD·Filed 2005·Granted Mar 18, 2008·23 cites·25 claims
- 0991US9302260B2Method and system for forming plug and play metal catalystsSDCMATERIALS INC·Filed 2013·Granted Apr 5, 2016·4 cites·15 claims
- 1091US8759248B2Method and system for forming plug and play metal catalystsSDCMATERIALS INC·Filed 2012·Granted Jun 24, 2014·4 cites·12 claims
- 1190US9597662B2Method and system for forming plug and play metal compound catalystsSDCMATERIALS INC·Filed 2015·Granted Mar 21, 2017·2 cites·17 claims
- 1283US7789971B2Treatment of substrate using functionalizing agent in supercritical carbon dioxideTOKYO ELECTRON LTD·Filed 2005·Granted Sep 7, 2010·9 cites·17 claims
- 1369US9737878B2Method and system for forming plug and play metal catalystsSDCMATERIALS INC·Filed 2016·Granted Aug 22, 2017·0 cites·13 claims
- 1450US2008076262A1Method and system for treating a dielectric filmTOKYO ELECTRON LTD·Filed 2007·Application pending·0 cites
- 1541US2006223899A1Removal of porogens and porogen residues using supercritical CO2HILLMAN JOSEPH T·Filed 2005·Application pending·0 cites
- 1640US2006180174A1Method and system for treating a substrate with a high pressure fluid using a peroxide-based process chemistry in conjunction with an initiatorTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 1737US2006102590A1Method for treating a substrate with a high pressure fluid using a preoxide-based process chemistryTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 1834US2006102591A1Method and system for treating a substrate using a supercritical fluidTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1934US2006180572A1Removal of post etch residue for a substrate with open metal surfacesTOKYO ELECTRON LTD·Filed 2005·Application pending·0 cites
- 2032US2006186088A1Etching and cleaning BPSG material using supercritical processingJACOBSON GUNILLA·Filed 2005·Application pending·0 cites
- 2131US2006255012A1Removal of particles from substrate surfaces using supercritical processingJACOBSON GUNILLA·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →