Inventor · disambiguated record
Robert Lum
Also filed as: LUM ROBERT · LUM ROBERT T
6 granted patents·1 pending application·228 citations·filing 1992–2014
85Inventor score
Top patents by PatentIndex Score
7 records- 0188US6857941B2Multi-phase polishing padAPPLIED MATERIALS INC·Filed 2002·Granted Feb 22, 2005·34 cites·6 claims
- 0286US5338398ATungsten silicide etch process selective to photoresist and oxideAPPLIED MATERIALS INC·Filed 1992·Granted Aug 16, 1994·148 cites·23 claims
- 0385US6468136B1Tungsten CMP with improved alignment mark integrity, reduced edge residue, and reduced retainer ring notchingAPPLIED MATERIALS INC·Filed 2000·Granted Oct 22, 2002·30 cites·21 claims
- 0484US9486893B2Conditioning of grooving in polishing padsAPPLIED MATERIALS INC·Filed 2014·Granted Nov 8, 2016·6 cites·20 claims
- 0570US8133096B2Multi-phase polishing padEMAMI RAMIN·Filed 2005·Granted Mar 13, 2012·6 cites·23 claims
- 0647US2009278081A1Pad properties using nanoparticle additivesAPPLIED MATERIALS INC·Filed 2009·Application pending·0 cites
- 0746US7048607B1System and method for chemical mechanical planarizationAPPLIED MATERIALS INC·Filed 2000·Granted May 23, 2006·4 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →