Inventor · disambiguated record
Roland Mader
Also filed as: MADER ROLAND
3 granted patents·73 citations·filing 1997–2002
74Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0184US6614005B1Device and method for thermally treating substratesSTEAG RTP SYSTEMS GMBH·Filed 2000·Granted Sep 2, 2003·36 cites·39 claims
- 0264US7144826B2Method and apparatus for the production of process gas that includes water vapor and hydrogen formed by burning oxygen in a hydrogen-rich environmentMATTSON THERMAL PRODUCTS·Filed 2002·Granted Dec 5, 2006·15 cites·28 claims
- 0350US5935650AMethod of oxidation of semiconductor wafers in a rapid thermal processing (RTP) systemFiled 1997·Granted Aug 10, 1999·22 cites·13 claims
Join the waitlist — get patent alerts
Get an alert when Roland Mader files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →