Inventor · disambiguated record
Robert O'Donnell
Also filed as: O'DONNELL ROBERT · O'DONNELL ROBERT J · O'DONNELL ROBERT JOHN
40 granted patents·6 pending applications·1,245 citations·filing 1977–2018
98Inventor score
Top patents by PatentIndex Score
46 records- 0198US8318327B2Low contamination components for semiconductor processing apparatus and methods for making componentsO'DONNELL ROBERT J·Filed 2009·Granted Nov 27, 2012·363 cites·14 claims
- 0297US6537429B2Diamond coatings on reactor wall and method of manufacturing thereofLAM RES CORP·Filed 2000·Granted Mar 25, 2003·110 cites·31 claims
- 0396US7300537B2Productivity enhancing thermal sprayed yttria-containing coating for plasma reactorLAM RES CORP·Filed 2004·Granted Nov 27, 2007·64 cites·18 claims
- 0496US6780787B2Low contamination components for semiconductor processing apparatus and methods for making componentsLAM RES CORP·Filed 2002·Granted Aug 24, 2004·53 cites·42 claims
- 0595US7311797B2Productivity enhancing thermal sprayed yttria-containing coating for plasma reactorLAM RES CORP·Filed 2002·Granted Dec 25, 2007·50 cites·19 claims
- 0694US6620520B2Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereofLAM RES CORP·Filed 2000·Granted Sep 16, 2003·54 cites·11 claims
- 0794US6533910B2Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereofLAM RES CORP·Filed 2000·Granted Mar 18, 2003·62 cites·21 claims
- 0893US7363727B2Method for utilizing a meniscus in substrate processingLAM RES CORP·Filed 2006·Granted Apr 29, 2008·19 cites·7 claims
- 0993US6830622B2Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereofLAM RES CORP·Filed 2001·Granted Dec 14, 2004·63 cites·29 claims
- 1092US6988326B2Phobic barrier meniscus separation and containmentLAM RES CORP·Filed 2004·Granted Jan 24, 2006·59 cites·28 claims
- 1192US6954993B1Concentric proximity processing headLAM RES CORP·Filed 2004·Granted Oct 18, 2005·64 cites·23 claims
- 1291US7255898B2Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereofLAM RES CORP·Filed 2003·Granted Aug 14, 2007·29 cites·11 claims
- 1391US6613442B2Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereofLAM RES CORP·Filed 2000·Granted Sep 2, 2003·49 cites·15 claims
- 1489US7093375B2Apparatus and method for utilizing a meniscus in substrate processingLAM RES CORP·Filed 2004·Granted Aug 22, 2006·37 cites·15 claims
- 1586US7605086B2Corrosion resistant component of semiconductor processing equipment and method of manufacture thereofLAM RES CORP·Filed 2006·Granted Oct 20, 2009·8 cites·13 claims
- 1685US6773751B2Boron nitride/yttria composite components of semiconductor processing equipment and method of manufacturing thereofLAM RES CORP·Filed 2003·Granted Aug 10, 2004·26 cites·15 claims
- 1780US7703462B2Reduction of entrance and exit marks left by a substrate-processing meniscusLAM RES CORP·Filed 2006·Granted Apr 27, 2010·4 cites·13 claims
- 1880US5994235AMethods for etching an aluminum-containing layerLAM RES CORP·Filed 1998·Granted Nov 30, 1999·51 cites·26 claims
- 1978US10651097B2Using identifiers to map edge ring part numbers onto slot numbersLAM RES CORP·Filed 2018·Granted May 12, 2020·3 cites·21 claims
- 2078US7946303B2Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscusLAM RES CORP·Filed 2006·Granted May 24, 2011·4 cites·23 claims
- 2178US7503977B1Solidifying layer for wafer cleaningLAM RES CORP·Filed 2005·Granted Mar 17, 2009·6 cites·6 claims
- 2272US6790242B2Fullerene coated component of semiconductor processing equipment and method of manufacturing thereofLAM RES CORP·Filed 2000·Granted Sep 14, 2004·11 cites·30 claims
- 2370US6475298B1Post-metal etch treatment to prevent corrosionLAM RES CORP·Filed 2000·Granted Nov 5, 2002·14 cites·14 claims
- 2469US2013059071A1Low contamination components for semiconductor processsing apparatus and methods for making componentsLAM RES CORP·Filed 2012·Application pending·0 cites
- 2565US8486841B2Corrosion resistant component of semiconductor processing equipment and method of manufacture thereofO'DONNELL ROBERT J·Filed 2009·Granted Jul 16, 2013·1 cites·10 claims
- 2663US8935990B2Low contamination components for semiconductor processing apparatus and methods for making componentsO'DONNELL ROBERT J·Filed 2009·Granted Jan 20, 2015·0 cites·15 claims
- 2762US8141566B2System, method and apparatus for maintaining separation of liquids in a controlled meniscusO'DONNELL ROBERT·Filed 2007·Granted Mar 27, 2012·1 cites·17 claims
- 2862US2009068845A1Low contamination components for semiconductor processing apparatus and methods for making componentsLAM RES CORP·Filed 2008·Application pending·0 cites
- 2956US8623152B2Reduction of entrance and exit marks left by a substrate-processing meniscusO'DONNELL ROBERT·Filed 2012·Granted Jan 7, 2014·0 cites·10 claims
- 3053US8534303B2Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscusO'DONNELL ROBERT·Filed 2011·Granted Sep 17, 2013·0 cites·20 claims
- 3153US4170839AChild's toy in the form of a miniature storm sewer systemDONNELL ROBERT J O·Filed 1977·Granted Oct 16, 1979·11 cites·19 claims
- 3252US8105441B2Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscusO'DONNELL ROBERT·Filed 2011·Granted Jan 31, 2012·0 cites·20 claims
- 3351US8317932B2Reduction of entrance and exit marks left by a substrate-processing meniscusO'DONNELL ROBERT·Filed 2010·Granted Nov 27, 2012·0 cites·10 claims
- 3451US7270760B2Method and apparatus for simulating standard test wafersLAM RES CORP·Filed 2005·Granted Sep 18, 2007·0 cites·20 claims
- 3551US2005003240A1Low contamination components for semiconductor processing apparatus and methods for making componentsLAM RES CORP·Filed 2004·Application pending·0 cites
- 3649US8637408B2In-situ reclaim of volatile componentsO'DONNELL ROBERT·Filed 2012·Granted Jan 28, 2014·0 cites·12 claims
- 3749US8313582B2System, method and apparatus for maintaining separation of liquids in a controlled meniscusO'DONNELL ROBERT·Filed 2012·Granted Nov 20, 2012·0 cites·19 claims
- 3849US8309470B2In-situ reclaim of volatile componentsO'DONNELL ROBERT·Filed 2006·Granted Nov 13, 2012·0 cites·11 claims
- 3949US6852636B1Insitu post etch process to remove remaining photoresist and residual sidewall passivationLAM RES CORP·Filed 1999·Granted Feb 8, 2005·14 cites·16 claims
- 4048US7128804B2Corrosion resistant component of semiconductor processing equipment and method of manufacture thereofLAM RES CORP·Filed 2000·Granted Oct 31, 2006·1 cites·22 claims
- 4146US2010294742A1Modifications to Surface Topography of Proximity HeadMAGNI ENRICO·Filed 2009·Application pending·0 cites
- 4244US2005064248A1Cerium oxide containing ceramic components and coatings in semiconductor processing equipment and methods of manufacture thereofFiled 2004·Application pending·0 cites
- 4339US2001054600A1Method and apparatus for simulating standard test wafersFiled 2001·Application pending·0 cites
- 4437US6069035ATechniques for etching a transition metal-containing layerLAM RESEARH CORP·Filed 1997·Granted May 30, 2000·10 cites·28 claims
- 4534US6242107B1Methods for etching an aluminum-containing layerLAM RES CORP·Filed 1999·Granted Jun 5, 2001·3 cites·20 claims
- 4630US6296778B1Method and apparatus for simulating standard test wafersLAM RES CORP·Filed 1999·Granted Oct 2, 2001·1 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →