Inventor · disambiguated record
Robert G. Ozarski
Also filed as: LUGOSI STEVE · OZARSKI ROBERT · OZARSKI ROBERT G
15 granted patents·3 pending applications·1,083 citations·filing 1975–2021
95Inventor score
Top patents by PatentIndex Score
18 records- 0198US6128323AReliable modular production quality narrow-band high REP rate excimer laserCYMER INC·Filed 1998·Granted Oct 3, 2000·284 cites·56 claims
- 0298US5991324AReliable. modular, production quality narrow-band KRF excimer laserCYMER INC·Filed 1998·Granted Nov 23, 1999·196 cites·16 claims
- 0394US4909631AMethod for film thickness and refractive index determinationTAN RAUL Y·Filed 1987·Granted Mar 20, 1990·208 cites·7 claims
- 0490US6067306ALaser-illuminated stepper or scanner with energy sensor feedbackCYMER INC·Filed 1998·Granted May 23, 2000·84 cites·19 claims
- 0588US5044752AApparatus and process for positioning wafers in receiving devicesGEN SIGNAL CORP·Filed 1989·Granted Sep 3, 1991·108 cites·11 claims
- 0686US5978405ALaser chamber with minimized acoustic and shock wave disturbancesCYMER INC·Filed 1998·Granted Nov 2, 1999·68 cites·23 claims
- 0782US11242100B2Overhead storage devices, systems, and methodsSPORTS NEST INC·Filed 2021·Granted Feb 8, 2022·3 cites·20 claims
- 0880US6229639B1Multiplexer for laser lithographyCYMER INC·Filed 1998·Granted May 8, 2001·45 cites·9 claims
- 0961US4857738AAbsorption measurements of materialsGEN SIGNAL CORP·Filed 1987·Granted Aug 15, 1989·22 cites·19 claims
- 1058US5336325AEnhanced vertical thermal reactor systemASM VT INC·Filed 1991·Granted Aug 9, 1994·33 cites·12 claims
- 1145US6396062B1Portable laser beam monitorCYMER INC·Filed 1999·Granted May 28, 2002·13 cites·10 claims
- 1243US6111907ALaser chamber installation in and removal from a laser system housingCYMER INC·Filed 1999·Granted Aug 29, 2000·10 cites·34 claims
- 1340US4874240ACharacterization of semiconductor resist material during processingHOECHST CELANESE·Filed 1988·Granted Oct 17, 1989·6 cites·10 claims
- 1438US2002127497A1Large diffraction grating for gas discharge laserFiled 2001·Application pending·0 cites
- 1531US4368169APyrochemical processes for the decomposition of waterTEXAS GAS TRANSMISSION CORP·Filed 1975·Granted Jan 11, 1983·3 cites·3 claims
- 1631US2012068133A1Overhead Storage DeviceOZARSKI ROBERT·Filed 2011·Application pending·0 cites
- 1729US2001003035A1Diffraction grating and fabrication technique for sameFiled 1998·Application pending·0 cites
- 1823US11401137B2Overhead storage deviceOZARSKI ROBERT·Filed 2015·Granted Aug 2, 2022·0 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →