Inventor · disambiguated record
Roelof Aeilko Siebrand Ritsema
Also filed as: RITSEMA ROELOF AEILKO SIEBRAND · RITSEMA Roelof Aeilko Siebranc
35 granted patents·1 pending application·3,389 citations·filing 2003–2019
98Inventor score
Technology areasG03F
Top patents by PatentIndex Score
36 records- 0199US9740107B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Aug 22, 2017·10 cites·20 claims
- 0299US9366972B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Jun 14, 2016·14 cites·20 claims
- 0399US8482845B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jul 9, 2013·32 cites·16 claims
- 0499US7593092B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Sep 22, 2009·60 cites·15 claims
- 0599US7593093B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2007·Granted Sep 22, 2009·67 cites·9 claims
- 0699US7388648B2Lithographic projection apparatusASML NETHERLANDS BV·Filed 2005·Granted Jun 17, 2008·136 cites·20 claims
- 0799US7213963B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2004·Granted May 8, 2007·196 cites·28 claims
- 0899US7199858B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Apr 3, 2007·409 cites·29 claims
- 0999US7193232B2Lithographic apparatus and device manufacturing method with substrate measurement not through liquidASML NETHERLANDS BV·Filed 2003·Granted Mar 20, 2007·216 cites·33 claims
- 1099US7081943B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Jul 25, 2006·199 cites·51 claims
- 1199US6952253B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted Oct 4, 2005·1.8k cites·45 claims
- 1298US7482611B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2006·Granted Jan 27, 2009·65 cites·38 claims
- 1398US7372541B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted May 13, 2008·74 cites·32 claims
- 1496US9482966B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2012·Granted Nov 1, 2016·12 cites·74 claims
- 1596US8154708B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2006·Granted Apr 10, 2012·23 cites·20 claims
- 1696US7795603B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2008·Granted Sep 14, 2010·15 cites·18 claims
- 1795US8472002B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Jun 25, 2013·7 cites·28 claims
- 1895US7982850B2Immersion lithographic apparatus and device manufacturing method with gas supplyASML NETHERLANDS BV·Filed 2008·Granted Jul 19, 2011·14 cites·20 claims
- 1993US9091940B2Lithographic apparatus and method involving a fluid inlet and a fluid outletASML NETHERLANDS BV·Filed 2012·Granted Jul 28, 2015·5 cites·71 claims
- 2093US8797503B2Lithographic apparatus and device manufacturing method with a liquid inlet above an aperture of a liquid confinement structureLOF JOERI·Filed 2011·Granted Aug 5, 2014·5 cites·20 claims
- 2188US8558989B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2010·Granted Oct 15, 2013·3 cites·33 claims
- 2287US10503084B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Dec 10, 2019·2 cites·20 claims
- 2374US10788755B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2018·Granted Sep 29, 2020·0 cites·19 claims
- 2473US10678139B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Jun 9, 2020·0 cites·36 claims
- 2570US10191389B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Jan 29, 2019·0 cites·20 claims
- 2667US10962891B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2019·Granted Mar 30, 2021·0 cites·20 claims
- 2767US10180629B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Jan 15, 2019·0 cites·20 claims
- 2864US10222706B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Mar 5, 2019·0 cites·20 claims
- 2963US9057967B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2009·Granted Jun 16, 2015·0 cites·10 claims
- 3062US9541843B2Lithographic apparatus and device manufacturing method involving a sensor detecting a radiation beam through liquidLOF JOERI·Filed 2011·Granted Jan 10, 2017·0 cites·35 claims
- 3161US9195153B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2012·Granted Nov 24, 2015·0 cites·10 claims
- 3261US9152058B2Lithographic apparatus and device manufacturing method involving a member and a fluid openingLOF JOERI·Filed 2011·Granted Oct 6, 2015·0 cites·19 claims
- 3361US9081299B2Lithographic apparatus and device manufacturing method involving removal of liquid entering a gapLOF JOERI·Filed 2011·Granted Jul 14, 2015·0 cites·20 claims
- 3460US8208120B2Lithographic apparatus and device manufacturing methodLOF JOERI·Filed 2008·Granted Jun 26, 2012·0 cites·18 claims
- 3560US2016062248A1Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Application pending·0 cites
- 3656US10261428B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Granted Apr 16, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →