Inventor · disambiguated record
Robert F. Sarkozy
Also filed as: SARKOZY ROBERT F
6 granted patents·734 citations·filing 1983–1987
87Inventor score
Top patents by PatentIndex Score
6 records- 0195US4854266ACross-flow diffusion furnaceBTU ENG CORP·Filed 1987·Granted Aug 8, 1989·532 cites·7 claims
- 0290US4793283AApparatus for chemical vapor deposition with clean effluent and improved product yieldSARKOZY ROBERT F·Filed 1987·Granted Dec 27, 1988·102 cites·6 claims
- 0380US4573431AModular V-CVD diffusion furnaceBTU ENG CORP·Filed 1985·Granted Mar 4, 1986·46 cites·4 claims
- 0473US4484538AApparatus for providing depletion-free uniform thickness CVD thin-film on semiconductor wafersBTU ENG CORP·Filed 1983·Granted Nov 27, 1984·19 cites·12 claims
- 0569US4556584AMethod for providing substantially waste-free chemical vapor deposition of thin-film on semiconductor substratesBTU ENG CORP·Filed 1984·Granted Dec 3, 1985·25 cites·7 claims
- 0645US4624638ACVD boat loading mechanism having a separable, low profile cantilevered paddle assemblyBTU ENG CORP·Filed 1984·Granted Nov 25, 1986·10 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →