Inventor · disambiguated record
Robert A. Shannon
Also filed as: SHANNON ROBERT A · SHANNON ROBERT ALAN
9 granted patents·351 citations·filing 1998–2002
91Inventor score
Files withCYMER INC9
Top patents by PatentIndex Score
9 records- 0197US6757316B2Four KHz gas discharge laserCYMER INC·Filed 2001·Granted Jun 29, 2004·97 cites·43 claims
- 0292US6466602B1Gas discharge laser long life electrodesCYMER INC·Filed 2000·Granted Oct 15, 2002·69 cites·31 claims
- 0388US6914919B2Six to ten KHz, or greater gas discharge laser systemCYMER INC·Filed 2002·Granted Jul 5, 2005·34 cites·69 claims
- 0486US6882674B2Four KHz gas discharge laser systemCYMER INC·Filed 2001·Granted Apr 19, 2005·31 cites·66 claims
- 0585US6034978AGas discharge laser with gas temperature controlCYMER INC·Filed 1999·Granted Mar 7, 2000·70 cites·28 claims
- 0653US6034984ATangential fan with cutoff assembly and vibration control for electric discharge laserCYMER INC·Filed 1999·Granted Mar 7, 2000·17 cites·9 claims
- 0752US6023486ASoldered fan assembly for electric discharge laserCYMER INC·Filed 1999·Granted Feb 8, 2000·13 cites·23 claims
- 0849US6061376ATangential fan for excimer laserCYMER INC·Filed 1998·Granted May 9, 2000·14 cites·30 claims
- 0936US6144686ATangential fan with cutoff assembly and vibration control for electric discharge laserCYMER INC·Filed 1999·Granted Nov 7, 2000·6 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →