Inventor · disambiguated record
Rodney G Smedt
Also filed as: SMEDT RODNEY · SMEDT RODNEY G
6 granted patents·274 citations·filing 1990–2003
88Inventor score
Technology areasH10P
Top patents by PatentIndex Score
6 records- 0189US6204917B1Backside contamination inspection deviceKLA TENCOR CORP·Filed 1999·Granted Mar 20, 2001·77 cites·15 claims
- 0287US6702302B2Edge handling wafer chuckKLA TENCOR CORP·Filed 2001·Granted Mar 9, 2004·36 cites·20 claims
- 0385US6217034B1Edge handling wafer chuckKLA TENCOR CORP·Filed 1999·Granted Apr 17, 2001·70 cites·22 claims
- 0484US6559938B1Backside contamination inspection deviceKLA TENCOR CORP·Filed 2000·Granted May 6, 2003·25 cites·23 claims
- 0572US7038771B2Backside contamination inspection deviceKLA TENCOR CORP·Filed 2003·Granted May 2, 2006·10 cites·20 claims
- 0669US5043589ASemiconductor device inspection apparatus using a plurality of reflective elementsTRIGON ADCOTECH·Filed 1990·Granted Aug 27, 1991·56 cites·23 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →