Inventor · disambiguated record
Robert J. Stoya
Also filed as: KOROVINA LEGAL REPRESENTATIVE · STOYA ROBERT J
3 granted patents·71 citations·filing 2004–2005
74Inventor score
Files withNOVELLUS SYSTEMS INC3
Top patents by PatentIndex Score
3 records- 0195US7189140B1Methods using eddy current for calibrating a CMP toolNOVELLUS SYSTEMS INC·Filed 2005·Granted Mar 13, 2007·33 cites·20 claims
- 0281US7198545B1Method of calibration and data evaluation for eddy current metrology systemsNOVELLUS SYSTEMS INC·Filed 2005·Granted Apr 3, 2007·15 cites·19 claims
- 0381US6953382B1Methods and apparatuses for conditioning polishing surfaces utilized during CMP processingNOVELLUS SYSTEMS INC·Filed 2004·Granted Oct 11, 2005·23 cites·49 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →