Inventor · disambiguated record
Robertus Wilhelmus Van Der Heijden
Also filed as: VAN DER HEIJDEN ROBERTUS WILHELMUS
3 granted patents·2 pending applications·4 citations·filing 2010–2018
56Inventor score
Top patents by PatentIndex Score
5 records- 0182US10324379B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2016·Granted Jun 18, 2019·3 cites·14 claims
- 0271US11669017B2Method for controlling a manufacturing apparatus and associated apparatusesASML NETHERLANDS BV·Filed 2018·Granted Jun 6, 2023·1 cites·20 claims
- 0347US2013017378A1Apparatus and Method for Providing Resist Alignment Marks in a Double Patterning Lithographic ProcessASML NETHERLANDS BV·Filed 2012·Application pending·0 cites
- 0441US8329366B2Apparatus and method for providing resist alignment marks in a double patterning lithographic processDOYTCHEVA MAYA ANGELOVA·Filed 2010·Granted Dec 11, 2012·0 cites·13 claims
- 0533US2011003256A1Lithographic Apparatus and Device Manufacturing MethodASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →