Inventor · disambiguated record
Roger L. Verkuil
Also filed as: VERKUIL ROGER L · VERKUIL ROGER LEONARD
29 granted patents·2,296 citations·filing 1975–2005
98Inventor score
Top patents by PatentIndex Score
29 records- 0197US4812756AContactless technique for semicondutor wafer testingIBM·Filed 1987·Granted Mar 14, 1989·220 cites·12 claims
- 0296US6202029B1Non-contact electrical conduction measurement for insulating filmsFiled 2000·Granted Mar 13, 2001·90 cites·10 claims
- 0395US6191605B1Contactless method for measuring total charge of an insulating layer on a substrate using corona chargeFiled 1997·Granted Feb 20, 2001·111 cites·11 claims
- 0495US6104206AProduct wafer junction leakage measurement using corona and a kelvin probeFiled 1997·Granted Aug 15, 2000·141 cites·7 claims
- 0595US6097196ANon-contact tunnelling field measurement for a semiconductor oxide layerFiled 1997·Granted Aug 1, 2000·116 cites·4 claims
- 0695US5485091AContactless electrical thin oxide measurementsIBM·Filed 1995·Granted Jan 16, 1996·197 cites·9 claims
- 0795US4015203AContactless LSI junction leakage testing methodIBM·Filed 1975·Granted Mar 29, 1977·65 cites·5 claims
- 0895US3974486AMultiplication mode bistable field effect transistor and memory utilizing sameIBM·Filed 1975·Granted Aug 10, 1976·79 cites·19 claims
- 0994US6060709AApparatus and method for depositing uniform charge on a thin oxide semiconductor waferFiled 1997·Granted May 9, 2000·64 cites·14 claims
- 1092US6072320AProduct wafer junction leakage measurement using light and eddy currentFiled 1997·Granted Jun 6, 2000·99 cites·4 claims
- 1192US5594247AApparatus and method for depositing charge on a semiconductor waferKEITHLEY INSTRUMENTS·Filed 1995·Granted Jan 14, 1997·120 cites·17 claims
- 1291US5767691AProbe-oxide-semiconductor method and apparatus for measuring oxide charge on a semiconductor waferIBM·Filed 1995·Granted Jun 16, 1998·104 cites·3 claims
- 1391US5216362AContactless technique for measuring epitaxial dopant concentration profiles in semiconductor wafersIBM·Filed 1991·Granted Jun 1, 1993·85 cites·6 claims
- 1489US5767693AMethod and apparatus for measurement of mobile charges with a corona screen gunKEITHLEY INSTRUMENTS·Filed 1996·Granted Jun 16, 1998·105 cites·2 claims
- 1589US5644223AUniform density charge deposit sourceIBM·Filed 1995·Granted Jul 1, 1997·104 cites·8 claims
- 1689US5498974AContactless corona-oxide-semiconductor Q-V mobile charge measurement method and apparatusIBM·Filed 1994·Granted Mar 12, 1996·81 cites·12 claims
- 1788US6121783AMethod and apparatus for establishing electrical contact between a wafer and a chuckFiled 1997·Granted Sep 19, 2000·103 cites·14 claims
- 1887US5650731APhotovoltaic oxide charge measurement probe techniqueIBM·Filed 1996·Granted Jul 22, 1997·96 cites·19 claims
- 1986US7230443B1Non-contact mobile charge measurement with leakage band-bending and dipole correctionKLA TENCOR CORP·Filed 2005·Granted Jun 12, 2007·14 cites·22 claims
- 2085US6091257AVacuum activated backside contactFiled 1998·Granted Jul 18, 2000·63 cites·3 claims
- 2184US5834941AMobile charge measurement using corona charge and ultraviolet lightKEITHLEY INSTRUMENTS·Filed 1997·Granted Nov 10, 1998·70 cites·7 claims
- 2280US6771092B1Non-contact mobile charge measurement with leakage band-bending and dipole correctionFiled 2002·Granted Aug 3, 2004·21 cites·1 claims
- 2377US5442297AContactless sheet resistance measurement method and apparatusIBM·Filed 1994·Granted Aug 15, 1995·62 cites·36 claims
- 2472US6228665B1Method of measuring oxide thickness during semiconductor fabricationIBM·Filed 2000·Granted May 8, 2001·14 cites·18 claims
- 2568US6522158B1Non-contact mobile charge measurement with leakage band-bending and dipole correctionKEITHLEY INSTRUMENTS·Filed 1997·Granted Feb 18, 2003·25 cites·1 claims
- 2663US6937050B1Non-contact mobile charge measurement with leakage band-bending and dipole correctionFiled 2004·Granted Aug 30, 2005·10 cites·1 claims
- 2762US5500607AProbe-oxide-semiconductor method and apparatus for measuring oxide charge on a semiconductor waferIBM·Filed 1993·Granted Mar 19, 1996·28 cites·33 claims
- 2859US6335630B2Contactless method for measuring total charge of an oxide layer on a semiconductor wafer using corona chargeFiled 2000·Granted Jan 1, 2002·6 cites·7 claims
- 2949US6448804B2Contactless total charge measurement with coronaFiled 2001·Granted Sep 10, 2002·3 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →