Inventor · disambiguated record
Robert John Wilby
Also filed as: WILBY ROBERT JOHN
13 granted patents·4 pending applications·141 citations·filing 2001–2023
92Inventor score
Top patents by PatentIndex Score
17 records- 0192US7340372B2Apparatus and method for investigating parameters of layers deposited on semiconductor wafersMETRYX LTD·Filed 2005·Granted Mar 4, 2008·22 cites·12 claims
- 0287US8357548B2Semiconductor wafer metrology apparatus and methodMETRYX LTD·Filed 2008·Granted Jan 22, 2013·11 cites·5 claims
- 0385US9818658B2Semiconductor wafer processing methods and apparatusMETRYX LTD·Filed 2014·Granted Nov 14, 2017·7 cites·20 claims
- 0485US7020577B2Apparatus and method for investigating semiconductors waferMETRYX LTD·Filed 2001·Granted Mar 28, 2006·31 cites·6 claims
- 0583US8200447B2Measuring apparatusWILBY ROBERT JOHN·Filed 2011·Granted Jun 12, 2012·7 cites·12 claims
- 0682US8683880B2Semiconductor wafer metrology apparatus and methodWILBY ROBERT JOHN·Filed 2008·Granted Apr 1, 2014·7 cites·3 claims
- 0781US9228886B2Semiconductor wafer weight metrology apparatusMETRYX LTD·Filed 2012·Granted Jan 5, 2016·4 cites·7 claims
- 0881US7892863B2Measuring apparatusMETRYX LTD·Filed 2007·Granted Feb 22, 2011·11 cites·10 claims
- 0978US8200353B2Measuring apparatusWILBY ROBERT JOHN·Filed 2008·Granted Jun 12, 2012·6 cites·21 claims
- 1075US6627535B2Methods and apparatus for forming a film on a substrateTRIKON HOLDINGS LTD·Filed 2001·Granted Sep 30, 2003·30 cites·9 claims
- 1171US9349624B2Semiconductor wafer monitoring apparatus and methodWILBY ROBERT JOHN·Filed 2009·Granted May 24, 2016·4 cites·11 claims
- 1260US9903750B2Method and device for determining information relating to the mass of a semiconductor waferMETRYX LTD·Filed 2014·Granted Feb 27, 2018·1 cites·31 claims
- 1355US9310244B2Semiconductor wafer metrology apparatus and methodMETRYX LTD·Filed 2014·Granted Apr 12, 2016·0 cites·10 claims
- 1446US2025155273A1Weighing device for a semiconductor waferMETRYX LTD·Filed 2023·Application pending·0 cites
- 1544US2024347352A1Device for changing the temperature of a waferMETRYX LTD·Filed 2022·Application pending·0 cites
- 1640US2004056356A1Methods and apparatus for forming a film on a substrateFiled 2003·Application pending·0 cites
- 1733US2017115158A1Semiconductor wafer weighing apparatus and methodsMETRYX LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →