Inventor · disambiguated record
Robert Wilhelm Willekers
Also filed as: WILLEKERS ROBERT WILHELM
2 granted patents·1 pending application·172 citations·filing 2002–2021
60Inventor score
Top patents by PatentIndex Score
3 records- 0195US6650399B2Lithographic projection apparatus, a grating module, a sensor module, a method of measuring wave front aberrationsASML NETHERLANDS BV·Filed 2002·Granted Nov 18, 2003·172 cites·15 claims
- 0251US2024085379A1Methods and apparatus for acoustic metrologyASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 0340US12332574B2Lithographic patterning method and system thereforeTNO·Filed 2019·Granted Jun 17, 2025·0 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Robert Wilhelm Willekers files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →