Inventor · disambiguated record
Ruud Antonius Catharina Maria Beerens
Also filed as: BEERENS RUUD ANTONIUS CATHARINA MARIA
23 granted patents·3 pending applications·28 citations·filing 2007–2020
91Inventor score
Files withASML NETHERLANDS BV12BEERENS RUUD ANTONIUS CATHARINA MARIA6STEIJAERT PETER PAUL3AANGENENT WILHELMUS HENRICUS THEODORUS MARIA1JAN BLEEKER ARNO1
Top patents by PatentIndex Score
26 records- 0187US8976335B2Lithographic apparatus and removable memberBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2011·Granted Mar 10, 2015·9 cites·21 claims
- 0272US7999912B2Lithographic apparatus and sensor calibration methodASML NETHERLANDS BV·Filed 2007·Granted Aug 16, 2011·7 cites·25 claims
- 0370US9141004B2Lithographic apparatus and methodVERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS·Filed 2012·Granted Sep 22, 2015·2 cites·20 claims
- 0469US8687166B2Lithographic apparatus having an encoder position sensor systemSTEIJAERT PETER PAUL·Filed 2007·Granted Apr 1, 2014·3 cites·20 claims
- 0565US9983482B2Radiation collector, radiation source and lithographic apparatusASML NETHERLANDS BV·Filed 2014·Granted May 29, 2018·2 cites·18 claims
- 0665US8736815B2Position sensor and lithographic apparatusBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2011·Granted May 27, 2014·1 cites·18 claims
- 0764US9141003B2Lithographic apparatus and device manufacturing methodBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2010·Granted Sep 22, 2015·1 cites·18 claims
- 0863US9360774B2Lithographic apparatus with a deformation sensorASML NETHERLANDS BV·Filed 2012·Granted Jun 7, 2016·1 cites·13 claims
- 0960US9494869B2Lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2012·Granted Nov 15, 2016·1 cites·20 claims
- 1053US9335641B2Optical element mount for lithographic apparatusTEGENBOSCH HENRICUS GERARDUS·Filed 2009·Granted May 10, 2016·1 cites·12 claims
- 1152US8836913B2Lithographic apparatus having an encoder type position sensor systemSTEIJAERT PETER PAUL·Filed 2011·Granted Sep 16, 2014·0 cites·15 claims
- 1251US8760615B2Lithographic apparatus having encoder type position sensor systemSTEIJAERT PETER PAUL·Filed 2008·Granted Jun 24, 2014·0 cites·20 claims
- 1350US2016349628A1Rotatable frame, lithographic apparatus, projection system, method for focusing radiation and device manufacturing methodASML NETHERLANDS BV·Filed 2016·Application pending·0 cites
- 1449US12242204B2Substrate support, lithographic apparatus, method for manipulating charge distribution and method for preparing a substrateASML NETHERLANDS BV·Filed 2020·Granted Mar 4, 2025·0 cites·20 claims
- 1547US9785060B2Stage system and lithographic apparatus comprising such stage systemASML NETHERLANDS BV·Filed 2013·Granted Oct 10, 2017·0 cites·19 claims
- 1647US9575416B2Lithographic apparatus, device manufacturing method and displacement measurement systemASML NETHERLANDS BV·Filed 2013·Granted Feb 21, 2017·0 cites·11 claims
- 1745US9410796B2Lithographic apparatus and methodASML NETHERLANDS BV·Filed 2012·Granted Aug 9, 2016·0 cites·17 claims
- 1845US9383659B2Positioning system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Jul 5, 2016·0 cites·14 claims
- 1943US9207547B2Lithographic apparatus and device manufacturing methodSPRUIT JOHANNES HENDRIKUS MARIA·Filed 2012·Granted Dec 8, 2015·0 cites·20 claims
- 2041US2014192337A1Lithographic apparatus, method of setting up a lithographic apparatus and device manufacturing methodJAN BLEEKER ARNO·Filed 2012·Application pending·0 cites
- 2140US9182683B2Lithographic apparatus and lithographic projection methodBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2012·Granted Nov 10, 2015·0 cites·18 claims
- 2239US8334983B2Lithographic apparatus and device manufacturing methodBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2010·Granted Dec 18, 2012·0 cites·20 claims
- 2339US2012224161A1Lithographic Apparatus and MethodBEERENS RUUD ANTONIUS CATHARINA MARIA·Filed 2012·Application pending·0 cites
- 2436US12007693B2Laser focussing moduleASML NETHERLANDS BV·Filed 2020·Granted Jun 11, 2024·0 cites·18 claims
- 2536US10061213B2Sensor, object positioning system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2015·Granted Aug 28, 2018·0 cites·20 claims
- 2633US9507277B2Lithographic apparatus and device manufacturing methodAANGENENT WILHELMUS HENRICUS THEODORUS MARIA·Filed 2011·Granted Nov 29, 2016·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →