Inventor · disambiguated record
Russell Allen Burdt
Also filed as: BURDT Russell Allen
7 granted patents·2 pending applications·3 citations·filing 2015–2025
71Inventor score
Files withCymer LLC9
Top patents by PatentIndex Score
9 records- 0181US9762023B2Online calibration for repetition rate dependent performance variablesCymer LLC·Filed 2015·Granted Sep 12, 2017·3 cites·31 claims
- 0273US2025314979A1Maintenance of modules for light sources used in semiconductor photolithographyCymer LLC·Filed 2025·Application pending·0 cites
- 0368US11050213B2Online calibration for repetition rate dependent performance variablesCymer LLC·Filed 2020·Granted Jun 29, 2021·0 cites·20 claims
- 0463US12360466B2Maintenance of modules for light sources used in semiconductor photolithographyCymer LLC·Filed 2022·Granted Jul 15, 2025·0 cites·23 claims
- 0559US12169363B2Radiation source testingCymer LLC·Filed 2020·Granted Dec 17, 2024·0 cites·30 claims
- 0656US10727642B2Online calibration for repetition rate dependent performance variablesCymer LLC·Filed 2017·Granted Jul 28, 2020·0 cites·31 claims
- 0755US11860036B2Determination of measurement error in an etalonCymer LLC·Filed 2021·Granted Jan 2, 2024·0 cites·29 claims
- 0854US2024319612A1Prediction apparatus and method for optical sourceCymer LLC·Filed 2022·Application pending·0 cites
- 0952US12007696B2Burst statistics data aggregation filterCymer LLC·Filed 2020·Granted Jun 11, 2024·0 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →