Inventor · disambiguated record
Russell J. Low
Also filed as: LOW RUSSELL · LOW RUSSELL J · LOW RUSSELL JOHN
42 granted patents·11 pending applications·217 citations·filing 2004–2014
97Inventor score
Files withVARIAN SEMICONDUCTOR EQUIPMENT32LOW RUSSELL J6BATEMAN NICHOLAS2RIORDON BENJAMIN2RIORDON BENJAMIN B2
Top patents by PatentIndex Score
53 records- 0195US7544958B2Contamination reduction during ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jun 9, 2009·30 cites·17 claims
- 0295US7446326B2Technique for improving ion implanter productivityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Nov 4, 2008·29 cites·19 claims
- 0390US7459704B2Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atomsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Dec 2, 2008·17 cites·36 claims
- 0490US7102139B2Source arc chamber for ion implanter having repeller electrode mounted to external insulatorVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Sep 5, 2006·14 cites·12 claims
- 0589US7586110B1Techniques for detecting ion beam contamination in an ion implantation system and interlocking sameVARIAN SEMICONDUCTOR EQUPMENT·Filed 2007·Granted Sep 8, 2009·16 cites·21 claims
- 0688US7491947B2Technique for improving performance and extending lifetime of indirectly heated cathode ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Feb 17, 2009·11 cites·14 claims
- 0788US7005657B1Wafer-scanning ion implanter having fast beam deflection apparatus for beam glitch recoveryVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Feb 28, 2006·16 cites·21 claims
- 0884US8937004B2Apparatus and method for controllably implanting workpiecesVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Jan 20, 2015·5 cites·13 claims
- 0984US8330127B2Flexible ion sourceLOW RUSSELL J·Filed 2008·Granted Dec 11, 2012·8 cites·17 claims
- 1084US8216923B2Integrated shadow mask/carrier for patterned ion implantationBATEMAN NICHOLAS·Filed 2010·Granted Jul 10, 2012·6 cites·20 claims
- 1184US8164068B2Mask health monitor using a faraday probeRIORDON BENJAMIN B·Filed 2010·Granted Apr 24, 2012·6 cites·14 claims
- 1284US8000080B2Particle trapVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 16, 2011·8 cites·24 claims
- 1384US7675046B2Terminal structure of an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Mar 9, 2010·8 cites·23 claims
- 1481US8084293B2Continuously optimized solar cell metallization design through feed-forward processRIORDON BENJAMIN·Filed 2010·Granted Dec 27, 2011·5 cites·17 claims
- 1579US8153466B2Mask applied to a workpieceLOW RUSSELL J·Filed 2010·Granted Apr 10, 2012·2 cites·18 claims
- 1676US7842934B2Terminal structures of an ion implanter having insulated conductors with dielectric finsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Nov 30, 2010·4 cites·22 claims
- 1774US8461030B2Apparatus and method for controllably implanting workpiecesRENAU ANTHONY·Filed 2010·Granted Jun 11, 2013·3 cites·19 claims
- 1872US9006688B2Techniques for processing a substrate using a maskDANIELS KEVIN M·Filed 2010·Granted Apr 14, 2015·3 cites·23 claims
- 1972US7482598B2Techniques for preventing parasitic beamlets from affecting ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jan 27, 2009·3 cites·28 claims
- 2071US7863520B2Interfacing two insulation parts in high voltage environmentVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jan 4, 2011·2 cites·5 claims
- 2171US7820986B2Techniques for controlling a charged particle beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Oct 26, 2010·2 cites·19 claims
- 2270US7361913B2Methods and apparatus for glitch recovery in stationary-beam ion implantation process using fast ion beam controlVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Apr 22, 2008·4 cites·18 claims
- 2369US7887034B2Indirectly heated cathode clamp system and methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Feb 15, 2011·2 cites·12 claims
- 2469US7576337B2Power supply for an ion implantation systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Aug 18, 2009·3 cites·16 claims
- 2569US7476877B2Wafer charge monitoringVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jan 13, 2009·2 cites·20 claims
- 2669US7402820B2Ion beam contamination determinationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2005·Granted Jul 22, 2008·3 cites·35 claims
- 2761US8756021B2Method and system for in-situ monitoring of cathode erosion and predicting cathode lifetimeLOW RUSSELL J·Filed 2010·Granted Jun 17, 2014·1 cites·6 claims
- 2861US8598547B2Handling beam glitches during ion implantation of workpiecesLOW RUSSELL J·Filed 2011·Granted Dec 3, 2013·0 cites·23 claims
- 2957US8143604B2Insulator system for a terminal structure of an ion implantation systemLOW RUSSELL·Filed 2006·Granted Mar 27, 2012·2 cites·14 claims
- 3056US9863032B2Techniques for processing a substrateVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2014·Granted Jan 9, 2018·0 cites·7 claims
- 3156US7999239B2Techniques for reducing an electrical stress in an acceleration/deceleraion systemVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Aug 16, 2011·0 cites·22 claims
- 3254US7799999B2Insulated conducting device with multiple insulation segmentsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Sep 21, 2010·0 cites·22 claims
- 3354US7528391B2Techniques for reducing contamination during ion implantationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted May 5, 2009·0 cites·20 claims
- 3453US8768040B2Substrate identification and tracking through surface reflectanceRIORDON BENJAMIN·Filed 2011·Granted Jul 1, 2014·0 cites·20 claims
- 3552US7476878B2Techniques for reducing effects of photoresist outgassingVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Granted Jan 13, 2009·0 cites·23 claims
- 3652US6984831B2Gas flow restricting cathode system for ion implanter and related methodVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2004·Granted Jan 10, 2006·2 cites·21 claims
- 3751US8455847B2Mask health monitor using a faraday probeRIORDON BENJAMIN B·Filed 2012·Granted Jun 4, 2013·0 cites·16 claims
- 3851US8455760B2Interfacing two insulation parts in high voltage environmentLOW RUSSELL J·Filed 2011·Granted Jun 4, 2013·0 cites·10 claims
- 3949US2009057573A1Techniques for terminal insulation in an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Application pending·0 cites
- 4049US2008105828A1Techniques for removing molecular fragments from an ion implanterVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Application pending·0 cites
- 4147US7821213B2Techniques for controlling a charged particle beamVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Oct 26, 2010·0 cites·24 claims
- 4247US2012244692A1Integrated shadow mask/carrier for pattern ion implantationBATEMAN NICHOLAS·Filed 2012·Application pending·0 cites
- 4347US2011094862A1Techniques for making high voltage connectionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2011·Application pending·0 cites
- 4446US7863531B2Techniques for making high voltage connectionsVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2007·Granted Jan 4, 2011·0 cites·8 claims
- 4546US2011056746A1Electric field modification about a conductive structureVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Application pending·0 cites
- 4645US8685846B2Technique for processing a substrateLOW RUSSELL J·Filed 2010·Granted Apr 1, 2014·0 cites·14 claims
- 4744US2011180131A1Method for attaching contacts to a solar cell without cell efficiency lossVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Application pending·0 cites
- 4843US2007137576A1Technique for providing an inductively coupled radio frequency plasma flood gunVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
- 4942US2007178678A1Methods of implanting ions and ion sources used for sameVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2006·Application pending·0 cites
- 5039US8461556B2Using beam blockers to perform a patterned implant of a workpieceDISTASO DANIEL·Filed 2010·Granted Jun 11, 2013·0 cites·17 claims
Showing the top 50 of 53 patent records by PatentIndex Score.
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