Inventor · disambiguated record
Ryota Goto
Also filed as: GOTO RYOTA
2 granted patents·3 pending applications·7 citations·filing 2013–2025
50Inventor score
Top patents by PatentIndex Score
5 records- 0175US9920424B2Method of cleaning thin film forming apparatus, thin film forming method, thin film forming apparatus and non-transitory recording mediumTOKYO ELECTRON LTD·Filed 2013·Granted Mar 20, 2018·6 cites·4 claims
- 0269US11081377B2Substrate processing systemTOKYO ELECTRON LTD·Filed 2019·Granted Aug 3, 2021·1 cites·16 claims
- 0353US2025174478A1Substrate transfer method and semiconductor manufacturing systemTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0453US2023230862A1Substrate transport method and substrate processing systemTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0545US2025278531A1Tooling model creation device, tooling model creation method, and programMITSUBISHI HEAVY IND LTD·Filed 2025·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →