Inventor · disambiguated record
Samuel Antley
Also filed as: ANTLEY SAMUEL S
2 granted patents·2 pending applications·18 citations·filing 2002–2005
58Inventor score
Top patents by PatentIndex Score
4 records- 0170US6899527B2Closed-drift hall effect plasma vacuum pump for process reactorsTOKYO ELECTRON LTD·Filed 2003·Granted May 31, 2005·10 cites·15 claims
- 0268US6729850B2Applied plasma duct systemTOKYO ELECTRON LTD·Filed 2002·Granted May 4, 2004·8 cites·30 claims
- 0338US2007074812A1Temperature control of plasma density probeMITROVIC ANDREJ·Filed 2005·Application pending·0 cites
- 0436US2007074811A1Method and apparatus for measuring plasma density in processing reactors using a long dielectric tubeMOROZ PAUL·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →