Inventor · disambiguated record
Sander Baltussen
Also filed as: BALTUSSEN SANDER
6 granted patents·4 pending applications·17 citations·filing 2010–2024
76Inventor score
Top patents by PatentIndex Score
10 records- 0190US10222701B2Radiation source, lithographic apparatus device manufacturing method, sensor system and sensing methodASML NETHERLANDS BV·Filed 2014·Granted Mar 5, 2019·11 cites·21 claims
- 0279US2024369920A1Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0373US8366423B2Method and arrangement for realizing a vacuum in a vacuum chamberMAPPER LITHOGRAPHY IP BV·Filed 2010·Granted Feb 5, 2013·3 cites·26 claims
- 0465US8857465B2Method and system for realizing a vacuum in a vacuum chamberMAPPER LITHOGRAPHY IP BV·Filed 2013·Granted Oct 14, 2014·1 cites·20 claims
- 0563US2022276553A1Pellicle membrane for a lithographic apparatusASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
- 0661US12072620B2Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2019·Granted Aug 27, 2024·0 cites·20 claims
- 0756US8690005B2Charged particle lithography apparatus and method of generating vacuum in a vacuum chamberBALTUSSEN SANDER·Filed 2010·Granted Apr 8, 2014·2 cites·51 claims
- 0852US11703768B2Lithographic apparatus and related methodsASML NETHERLANDS BV·Filed 2020·Granted Jul 18, 2023·0 cites·16 claims
- 0935US2011049393A1Lithography Machine and Substrate Handling ArrangementMAPPER LITHOGRAPHY IP BV·Filed 2010·Application pending·0 cites
- 1034US2011042579A1Charged particle lithography apparatus and method of generating vacuum in a vacuum chamberMAPPER LITHOGRAPHY IP BV·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →