Inventor · disambiguated record

Sadayuki Fujishima

Also filed as: FUJISHIMA SADAYUKI

4 granted patents·45 citations·filing 2002–2005

76Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD4

Top patents by PatentIndex Score

4 records

0175US6878216B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2002·Granted Apr 12, 2005·19 cites·14 claims
0273US6990988B2Substrate processing method and substrate processing systemTOKYO ELECTRON LTD·Filed 2005·Granted Jan 31, 2006·5 cites·5 claims
0367US7357846B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2004·Granted Apr 15, 2008·14 cites·16 claims
0459US6743297B2Rotary substrate processing apparatus and methodTOKYO ELECTRON LTD·Filed 2002·Granted Jun 1, 2004·7 cites·12 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →