Inventor · disambiguated record
Sathya Swaroop Ganta
Also filed as: GANTA SATHYA · GANTA SATHYA SWAROOP
6 granted patents·8 pending applications·3 citations·filing 2020–2024
69Inventor score
Files withAPPLIED MATERIALS INC14
Top patents by PatentIndex Score
14 records- 0190US12020965B2Magnetic holding structures for plasma processing applicationsAPPLIED MATERIALS INC·Filed 2020·Granted Jun 25, 2024·2 cites·10 claims
- 0285US11959174B2Shunt door for magnets in plasma process chamberAPPLIED MATERIALS INC·Filed 2020·Granted Apr 16, 2024·1 cites·20 claims
- 0376US2024271284A1Shunt door for magnets in plasma process chamberAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0473US2024297059A1Magnetic holding structures for plasma processing applicationsAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0566US12125689B2Methods and apparatus for toroidal plasma generationAPPLIED MATERIALS INC·Filed 2022·Granted Oct 22, 2024·0 cites·20 claims
- 0666US2025022694A1Heater plates with distributed purge channels, rf meshes and ground electrodesAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0763US12460298B2Showerhead design to control stray depositionAPPLIED MATERIALS INC·Filed 2021·Granted Nov 4, 2025·0 cites·18 claims
- 0861US2025259823A1Broadband microwave resonant antennaAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0958US2024395506A1Conical impedance transformer for microwave plasma processingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1057US2025116001A1Arc reduction and rf control for electrostatic chucks in semiconductor processingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1156US12033835B2Modular microwave source with multiple metal housingsAPPLIED MATERIALS INC·Filed 2020·Granted Jul 9, 2024·0 cites·12 claims
- 1254US11984302B2Magnetic-material shield around plasma chambers near pedestalAPPLIED MATERIALS INC·Filed 2020·Granted May 14, 2024·0 cites·16 claims
- 1354US2023377855A1Lower deposition chamber ccp electrode cleaning solutionAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1451US2024018646A1Rotary electrical feedthrough integration for process chamberAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →