Inventor · disambiguated record
Sadao Hisakado
Also filed as: HISAKADO SADAO
5 granted patents·2 pending applications·38 citations·filing 2004–2023
78Inventor score
Top patents by PatentIndex Score
7 records- 0195US11396700B2Substrate processing apparatusKOKUSAI ELECTRIC CORP·Filed 2021·Granted Jul 26, 2022·4 cites·13 claims
- 0293US8043431B2Substrate processing apparatus and method for manufacturing a semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2009·Granted Oct 25, 2011·16 cites·9 claims
- 0389US8282737B2Substrate processing apparatus and method for manufacturing a semiconductor deviceOZAKI TAKASHI·Filed 2011·Granted Oct 9, 2012·4 cites·9 claims
- 0477US8057599B2Substrate processing apparatus and method for manufacturing a semiconductor deviceOZAKI TAKASHI·Filed 2004·Granted Nov 15, 2011·14 cites·15 claims
- 0555US2023332290A1Substrate processing apparatus, nozzle assembly, substrate processing method, method of manufacturing semiconductor device and non-transitory computer-readable recording mediumKOKUSAI ELECTRIC CORP·Filed 2023·Application pending·0 cites
- 0653US12053805B2Method of cleaning member in process container, method of manufacturing semiconductor device, substrate processing apparatus, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2019·Granted Aug 6, 2024·0 cites·21 claims
- 0733US2009053021A1Semiconductor manufacturing apparatusYAMAGISHI NORICHIKA·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →