Inventor · disambiguated record
Satoru Kawakami
Also filed as: KAWAKAMI SATORU
47 granted patents·30 pending applications·1,633 citations·filing 1982–2025
98Inventor score
Top patents by PatentIndex Score
77 records- 0198US5478429APlasma process apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Dec 26, 1995·473 cites·17 claims
- 0297US5665166APlasma processing apparatusTOKYO ELECTRON LTD·Filed 1996·Granted Sep 9, 1997·190 cites·36 claims
- 0396US6399520B1Semiconductor manufacturing method and semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Jun 4, 2002·175 cites·13 claims
- 0495US5542559APlasma treatment apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Aug 6, 1996·254 cites·16 claims
- 0593US6558508B1Processing apparatus having dielectric plates linked together by electrostatic forceTOKYO ELECTRON LTD·Filed 2000·Granted May 6, 2003·71 cites·16 claims
- 0693US5494522APlasma process system and methodTOKYO ELECTRON LTD·Filed 1994·Granted Feb 27, 1996·90 cites·6 claims
- 0792US11923170B2Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Mar 5, 2024·6 cites·20 claims
- 0890US5665167APlasma treatment apparatus having a workpiece-side electrode grounding circuitTOKYO ELECTRON LTD·Filed 1994·Granted Sep 9, 1997·134 cites·13 claims
- 0988US6358324B1Microwave plasma processing apparatus having a vacuum pump located under a susceptorTOKYO ELECTRON LTD·Filed 2000·Granted Mar 19, 2002·31 cites·12 claims
- 1086US6432208B1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2000·Granted Aug 13, 2002·42 cites·14 claims
- 1183US6470824B2Semiconductor manufacturing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Oct 29, 2002·26 cites·3 claims
- 1282US9305751B2Microwave plasma processing apparatus and microwave supplying methodTOKYO ELECTRON LTD·Filed 2014·Granted Apr 5, 2016·4 cites·5 claims
- 1382US2025087703A1Energy storage device and method for manufacturing the sameGS YUASA INT LTD·Filed 2024·Application pending·0 cites
- 1477US6501082B1Plasma deposition apparatus and method with controllerTOKYO ELECTRON LTD·Filed 2000·Granted Dec 31, 2002·13 cites·16 claims
- 1576US12482635B2Plasma processing device, and plasma processing methodTOKYO ELECTRON LTD·Filed 2024·Granted Nov 25, 2025·0 cites·12 claims
- 1675US2024243405A1Energy storage apparatusGS YUASA INT LTD·Filed 2024·Application pending·0 cites
- 1773US9337945B2Receiving apparatus and receiving method for receiving broadcasting waves of different frequency bandsIMAI TADASHI·Filed 2012·Granted May 10, 2016·2 cites·15 claims
- 1873US8522958B2Vacuum processing apparatusTOBE YASUHIRO·Filed 2009·Granted Sep 3, 2013·6 cites·9 claims
- 1973US6161498APlasma processing device and a method of plasma processTOKYO ELECTRON LTD·Filed 1997·Granted Dec 19, 2000·40 cites·24 claims
- 2071US12412732B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Sep 9, 2025·0 cites·11 claims
- 2171US12351204B2Monitoring system, storage medium storing computer program for monitoring and method for monitoringTOYOTA MOTOR CO LTD·Filed 2023·Granted Jul 8, 2025·0 cites·7 claims
- 2271US9034513B2Energy storage deviceLithium Energy Japan·Filed 2013·Granted May 19, 2015·1 cites·23 claims
- 2368US6431114B1Method and apparatus for plasma processingTOKYO ELECTRON LTD·Filed 2000·Granted Aug 13, 2002·8 cites·6 claims
- 2466US4407999AWater repellent adhesive composition for wooden materialMITSUBISHI CHEM IND·Filed 1982·Granted Oct 4, 1983·20 cites·18 claims
- 2566US2025372348A1Radio-frequency power source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 2665US11538667B2Stage, plasma processing apparatus, and plasma processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Dec 27, 2022·0 cites·16 claims
- 2764US12466316B2Notification control device and notification control methodTOYOTA MOTOR CO LTD·Filed 2024·Granted Nov 11, 2025·0 cites·6 claims
- 2863US6284674B1Plasma processing device and a method of plasma processTOKYO ELECTRON LTD·Filed 2000·Granted Sep 4, 2001·8 cites·10 claims
- 2963US2024339304A1Plasma Processing Apparatus and Plasma Control MethodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 3063US2024203692A1Plasma processing apparatus and plasma control methodTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 3162US12482637B2Plasma source and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Nov 25, 2025·0 cites·20 claims
- 3262US12183929B2Energy storage device and method for manufacturing the sameGS YUASA INT LTD·Filed 2019·Granted Dec 31, 2024·0 cites·20 claims
- 3361US12148637B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Nov 19, 2024·0 cites·13 claims
- 3461US2024186114A1Plasma processing apparatus and assembly method of resonator array structureTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 3561US2024186113A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 3660US12456609B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Granted Oct 28, 2025·0 cites·20 claims
- 3759US12020900B2Plasma processing device, and plasma processing methodTOKYO ELECTRON LTD·Filed 2020·Granted Jun 25, 2024·0 cites·10 claims
- 3859US7634225B2Signal reception device, signal reception circuit, and reception deviceSONY CORP·Filed 2003·Granted Dec 15, 2009·5 cites·9 claims
- 3959US2011186425A1Magnetron sputtering method, and magnetron sputtering apparatusTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 4057US2024378918A1Visual recognition determination device and control method for visual recognition determination deviceTOYOTA MOTOR CO LTD·Filed 2024·Application pending·0 cites
- 4157US2024375641A1Control device for vehicle, control method for vehicle, and nontransitory computer recording mediumTOYOTA MOTOR CO LTD·Filed 2024·Application pending·0 cites
- 4257US2024317264A1Driver monitoring device, driver monitoring method, and non-transitory recording mediumTOYOTA MOTOR CO LTD·Filed 2024·Application pending·0 cites
- 4357US2023245870A1Plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 4456US7030938B2Tuner and receiver apparatusSONY CORP·Filed 2001·Granted Apr 18, 2006·6 cites·6 claims
- 4555US12051564B2Shower plate, plasma processing apparatus and plasma processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Jul 30, 2024·0 cites·12 claims
- 4655US2024148736A1Combination drug for treating renal cancer and potentiator for therapeutic effects of tyrosine kinase inhibitorUNIV SAITAMA MEDICAL·Filed 2021·Application pending·0 cites
- 4755US2009169344A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 4854US12261025B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Mar 25, 2025·0 cites·20 claims
- 4954US12217941B2Plasma processing apparatus, and plasma processing methodTOKYO ELECTRON LTD·Filed 2021·Granted Feb 4, 2025·0 cites·8 claims
- 5054US6066568APlasma treatment method and systemTOKYO ELECTRON LTD·Filed 1998·Granted May 23, 2000·21 cites·8 claims
Showing the top 50 of 77 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →