Inventor · disambiguated record
Satoru Kikushima
Also filed as: KIKUSHIMA SATORU
2 granted patents·1 pending application·0 citations·filing 2019–2023
27Inventor score
Technology areasH10P
Files withTOKYO ELECTRON LTD3
Top patents by PatentIndex Score
3 records- 0168US12381096B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2023·Granted Aug 5, 2025·0 cites·6 claims
- 0263US11791175B2Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2021·Granted Oct 17, 2023·0 cites·13 claims
- 0332US2019378724A1Etching method and etching apparatusTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →