Inventor · disambiguated record

Saito Makoto

Also filed as: MAKOTO SAITO

1 granted patent·4 citations·filing 2017–2017

24Inventor score

Technology areasC21D

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

1 record

0191US10003018B1Vertical multi-batch magnetic annealing systems for reduced footprint manufacturing environmentsTOKYO ELECTRON LTD·Filed 2017·Granted Jun 19, 2018·4 cites·30 claims

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