Inventor · disambiguated record
Saravana Kumar Natarajan
Also filed as: NATARAJAN SARAVANA · NATARAJAN SARAVANA KUMAR
3 granted patents·2 citations·filing 2012–2022
52Inventor score
Top patents by PatentIndex Score
3 records- 0186US11373845B2Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processesAPPLIED MATERIALS INC·Filed 2020·Granted Jun 28, 2022·2 cites·17 claims
- 0269US11901161B2Methods and apparatus for symmetrical hollow cathode electrode and discharge mode for remote plasma processesAPPLIED MATERIALS INC·Filed 2022·Granted Feb 13, 2024·0 cites·20 claims
- 0342US9019687B2Systems and methods for current density optimization in CMOS-integrated MEMS capacitive devicesMORRIS III ARTHUR S·Filed 2012·Granted Apr 28, 2015·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →