Inventor · disambiguated record
Sang Park
Also filed as: PARK SANG KWON
1 granted patent·3 pending applications·2 citations·filing 2003–2014
17Inventor score
Top patents by PatentIndex Score
4 records- 0139US7163719B2Method of depositing thin film using hafnium compoundIPS LTD·Filed 2003·Granted Jan 16, 2007·2 cites·17 claims
- 0235US2004187779A1Thin film deposition reactorFiled 2004·Application pending·0 cites
- 0332US2004180553A1Method of depositing ALD thin films on waferFiled 2004·Application pending·0 cites
- 0426US2015144060A1Cluster-batch type system for processing substrateTERA SEMICON CORP·Filed 2014·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →