Inventor · disambiguated record
Sascha Perlitz
Also filed as: PERLITZ SASCHA
6 granted patents·4 pending applications·16 citations·filing 2011–2024
76Inventor score
Top patents by PatentIndex Score
10 records- 0193US10068325B2Method for three-dimensionally measuring a 3D aerial image of a lithography maskZEISS CARL SMT GMBH·Filed 2017·Granted Sep 4, 2018·10 cites·20 claims
- 0278US2024152057A1Apparatus and method for characterizing a microlithographic maskZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0372US10634886B2Method for three-dimensionally measuring a 3D aerial image of a lithography maskZEISS CARL SMT GMBH·Filed 2018·Granted Apr 28, 2020·1 cites·6 claims
- 0470US11914303B2Apparatus and method for characterizing a microlithographic maskZEISS CARL SMT GMBH·Filed 2021·Granted Feb 27, 2024·0 cites·17 claims
- 0570US9213003B2Method for characterizing a structure on a mask and device for carrying out said methodPERLITZ SASCHA·Filed 2011·Granted Dec 15, 2015·2 cites·23 claims
- 0668US9297994B2Grating-assisted autofocus device and autofocusing method for an imaging devicePERLITZ SASCHA·Filed 2012·Granted Mar 29, 2016·3 cites·31 claims
- 0764US2024061328A1Method and apparatus for characterization of a microlithography maskZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 0863US2025208398A1Magnifying imaging optical unit for a metrology system for examining objectsZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0954US2023221571A1Optical system, in particular for characterizing a microlithography maskZEISS CARL SMT GMBH·Filed 2023·Application pending·0 cites
- 1051US9605946B2Method for characterizing a structure on a mask and device for carrying out said methodZEISS CARL SMT GMBH·Filed 2015·Granted Mar 28, 2017·0 cites·23 claims
Join the waitlist — get patent alerts
Get an alert when Sascha Perlitz files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →