Inventor · disambiguated record
Satish Radhakrishnan
Also filed as: RADHAKRISHNAN SATISH
17 granted patents·7 pending applications·16 citations·filing 2019–2024
88Inventor score
Files withAPPLIED MATERIALS INC24
Top patents by PatentIndex Score
24 records- 0191US11692261B2Evaporator chamber for forming films on substratesAPPLIED MATERIALS INC·Filed 2020·Granted Jul 4, 2023·2 cites·17 claims
- 0291US11393703B2Apparatus and method for controlling a flow process material to a deposition chamberAPPLIED MATERIALS INC·Filed 2019·Granted Jul 19, 2022·6 cites·14 claims
- 0390US11586160B2Reducing substrate surface scratching using machine learningAPPLIED MATERIALS INC·Filed 2021·Granted Feb 21, 2023·2 cites·20 claims
- 0484US11970775B2Showerhead for providing multiple materials to a process chamberAPPLIED MATERIALS INC·Filed 2019·Granted Apr 30, 2024·2 cites·17 claims
- 0583US12043895B2Methods of using a segmented showerhead for uniform delivery of multiple pre-cursorsAPPLIED MATERIALS INC·Filed 2022·Granted Jul 23, 2024·0 cites·20 claims
- 0679US12062567B2Systems and methods for substrate support temperature controlAPPLIED MATERIALS INC·Filed 2020·Granted Aug 13, 2024·1 cites·14 claims
- 0779US11600470B2Targeted heat control systemsAPPLIED MATERIALS INC·Filed 2019·Granted Mar 7, 2023·2 cites·20 claims
- 0877US12473639B2Methods for forming films on substratesAPPLIED MATERIALS INC·Filed 2022·Granted Nov 18, 2025·0 cites·14 claims
- 0973US11835927B2Reducing substrate surface scratching using machine learningAPPLIED MATERIALS INC·Filed 2022·Granted Dec 5, 2023·0 cites·20 claims
- 1073US11515176B2Thermally controlled lid stack componentsAPPLIED MATERIALS INC·Filed 2020·Granted Nov 29, 2022·1 cites·20 claims
- 1171US12438011B2Apparatus and method for controlling a flow process material to a deposition chamberAPPLIED MATERIALS INC·Filed 2022·Granted Oct 7, 2025·0 cites·20 claims
- 1268US12442079B2Dual channel showerhead assemblyAPPLIED MATERIALS INC·Filed 2022·Granted Oct 14, 2025·0 cites·12 claims
- 1367US11505863B2Methods for forming films on substratesAPPLIED MATERIALS INC·Filed 2020·Granted Nov 22, 2022·0 cites·14 claims
- 1463US2025374375A1Ultra-fast temperature switching pedestalAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1562US11834743B2Segmented showerhead for uniform delivery of multiple precursorsAPPLIED MATERIALS INC·Filed 2019·Granted Dec 5, 2023·0 cites·16 claims
- 1661US2023356354A1Compliant inner ring for a chemical mechanical polishing systemAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 1758US2025118593A1Processing chamber with rf return pathAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1856US11682544B2Cover wafer for semiconductor processing chamberAPPLIED MATERIALS INC·Filed 2020·Granted Jun 20, 2023·0 cites·19 claims
- 1952US11515129B2Radiation shield modification for improving substrate temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Nov 29, 2022·0 cites·20 claims
- 2050US11830706B2Heated pedestal design for improved heat transfer and temperature uniformityAPPLIED MATERIALS INC·Filed 2019·Granted Nov 28, 2023·0 cites·19 claims
- 2150US2024186121A1Thermal choke plateAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 2250US2022367236A1Heater pedestal with improved uniformityAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 2349US2023207345A1Base plate for heater pedestalAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 2448US2025118577A1Ceramic rf return kit designAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →