Inventor · disambiguated record
Sander Bas Roobol
Also filed as: ROOBOL SANDER BAS
22 granted patents·3 pending applications·32 citations·filing 2016–2022
92Inventor score
Files withASML NETHERLANDS BV25
Top patents by PatentIndex Score
25 records- 0191US10067068B2Lithographic apparatus and method for performing a measurementASML NETHERLANDS BV·Filed 2016·Granted Sep 4, 2018·5 cites·18 claims
- 0290US10133192B2Method and apparatus for determining the property of a structure, device manufacturing methodASML NETHERLANDS BV·Filed 2017·Granted Nov 20, 2018·6 cites·19 claims
- 0389US10451559B2Illumination source for an inspection apparatus, inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2018·Granted Oct 22, 2019·3 cites·13 claims
- 0488US10330606B2Illumination source for an inspection apparatus, inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2017·Granted Jun 25, 2019·3 cites·12 claims
- 0587US10379448B2Methods and apparatus for predicting performance of a measurement method, measurement method and apparatusASML NETHERLANDS BV·Filed 2018·Granted Aug 13, 2019·3 cites·20 claims
- 0684US11092902B2Method and apparatus for detecting substrate surface variationsASML NETHERLANDS BV·Filed 2018·Granted Aug 17, 2021·2 cites·14 claims
- 0782US10976265B2Optical detectorASML NETHERLANDS BV·Filed 2018·Granted Apr 13, 2021·2 cites·20 claims
- 0880US10530111B2Apparatus for delivering gas and illumination source for generating high harmonic radiationASML NETHERLANDS BV·Filed 2018·Granted Jan 7, 2020·1 cites·17 claims
- 0979US10267744B2Illumination source for an inspection apparatus, inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2017·Granted Apr 23, 2019·1 cites·19 claims
- 1078US10234771B2HHG source, inspection apparatus and method for performing a measurementASML NETHERLANDS BV·Filed 2017·Granted Mar 19, 2019·2 cites·19 claims
- 1175US10816906B2HHG source, inspection apparatus and method for performing a measurementASML NETHERLANDS BV·Filed 2019·Granted Oct 27, 2020·1 cites·20 claims
- 1274US10248029B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2016·Granted Apr 2, 2019·1 cites·20 claims
- 1373US10670974B2Metrology apparatus for and a method of determining a characteristic of interest of a structure on a substrateASML NETHERLANDS BV·Filed 2018·Granted Jun 2, 2020·1 cites·16 claims
- 1468US11626704B2Methods and apparatus for predicting performance of a measurement method, measurement method and apparatusASML NETHERLANDS BV·Filed 2018·Granted Apr 11, 2023·1 cites·21 claims
- 1564US10578979B2Method and apparatus for inspection and metrologyASML NETHERLANDS BV·Filed 2019·Granted Mar 3, 2020·0 cites·19 claims
- 1663US10630037B2Apparatus for delivering gas and illumination source for generating high harmonic radiationASML NETHERLANDS BV·Filed 2019·Granted Apr 21, 2020·0 cites·20 claims
- 1755US10649344B2Illumination source for an inspection apparatus, inspection apparatus and inspection methodASML NETHERLANDS BV·Filed 2017·Granted May 12, 2020·0 cites·20 claims
- 1854US12269229B2Reflector manufacturing method and associated reflectorASML NETHERLANDS BV·Filed 2020·Granted Apr 8, 2025·0 cites·14 claims
- 1954US10725387B2Determining an edge roughness parameter of a periodic structureASML NETHERLANDS BV·Filed 2018·Granted Jul 28, 2020·0 cites·20 claims
- 2052US11353796B2Method and apparatus for determining a radiation beam intensity profileASML NETHERLANDS BV·Filed 2019·Granted Jun 7, 2022·0 cites·17 claims
- 2151US10983361B2Methods of aligning a diffractive optical system and diffracting beams, diffractive optical element and apparatusASML NETHERLANDS BV·Filed 2018·Granted Apr 20, 2021·0 cites·20 claims
- 2250US2024168392A1Assembly for separating radiation in the far fieldASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2350US2024255279A1Metrology measurement method and apparatusASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 2448US10048596B2Method and apparatus for generating illuminating radiationASML NETHERLANDS BV·Filed 2017·Granted Aug 14, 2018·0 cites·22 claims
- 2548US2023040124A1Method for correcting measurements in the manufacture of integrated circuits and associated apparatusesASML NETHERLANDS BV·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →