Inventor · disambiguated record
Satoru Takahata
Also filed as: TAKAHATA SATORU
8 granted patents·4 pending applications·371 citations·filing 1984–2022
83Inventor score
Files withHITACHI INT ELECTRIC INC4KOKUSAI ELECTRIC CORP2OZAKI YUKIO2KAWAMOTO KOUICHI1NOMURA MAKOTO1
Top patents by PatentIndex Score
12 records- 0195US8443484B2Substrate processing apparatusOZAKI YUKIO·Filed 2008·Granted May 21, 2013·327 cites·9 claims
- 0292US4551211AAqueous anodizing solution and process for coloring article of magnesium or magnesium-base alloyUBE INDUSTRIES·Filed 1984·Granted Nov 5, 1985·42 cites·9 claims
- 0358US8904955B2Substrate processing apparatusNOMURA MAKOTO·Filed 2009·Granted Dec 9, 2014·1 cites·15 claims
- 0453US9437465B2Substrate processing apparatus and method of manufacturing semiconductor deviceTAKAHATA SATORU·Filed 2009·Granted Sep 6, 2016·1 cites·17 claims
- 0553US2010055808A1Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2009·Application pending·0 cites
- 0644US10452856B2Processing apparatus, controller and processing systemHITACHI INT ELECTRIC INC·Filed 2017·Granted Oct 22, 2019·0 cites·15 claims
- 0744US2015371914A1Substrate processing apparatus and method of manufacturing semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2015·Application pending·0 cites
- 0843US2023187243A1Substrate processing apparatus, method of manufacturing semiconductor device, and recording mediumKOKUSAI ELECTRIC CORP·Filed 2022·Application pending·0 cites
- 0940US9092894B2Display control device and display control program for grouping related items based upon locationKAWAMOTO KOUICHI·Filed 2007·Granted Jul 28, 2015·0 cites·15 claims
- 1034US11521880B2Substrate processing apparatus and recording medium for changing atmosphere of transfer chamberKOKUSAI ELECTRIC CORP·Filed 2019·Granted Dec 6, 2022·0 cites·13 claims
- 1134US2013247937A1Substrate processing apparatus and its maintenance method, substrate transfer method and programHITACHI INT ELECTRIC INC·Filed 2013·Application pending·0 cites
- 1231US8457774B2Substrate processing apparatus, control method of the substrate processing apparatus, manufacturing method of semiconductor device and apparatus state shifting methodOZAKI YUKIO·Filed 2010·Granted Jun 4, 2013·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →