Inventor · disambiguated record
Sachio Uto
Also filed as: UTO SACHIO
76 granted patents·9 pending applications·1,218 citations·filing 1983–2016
99Inventor score
Top patents by PatentIndex Score
85 records- 0198US6621571B1Method and apparatus for inspecting defects in a patterned specimenHITACHI LTD·Filed 2000·Granted Sep 16, 2003·149 cites·30 claims
- 0297US7528942B2Method and apparatus for detecting defectsHITACHI HIGH TECH CORP·Filed 2006·Granted May 5, 2009·32 cites·8 claims
- 0397US7465935B2Method for inspecting pattern defect and device for realizing the sameHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 16, 2008·45 cites·8 claims
- 0497US7333192B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 19, 2008·37 cites·20 claims
- 0597US7248352B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2003·Granted Jul 24, 2007·66 cites·4 claims
- 0696US6943086B2Laser annealing apparatus, TFT device and annealing method of the sameHITACHI LTD·Filed 2002·Granted Sep 13, 2005·82 cites·32 claims
- 0796US6556290B2Defect inspection method and apparatus thereforHITACHI LTD·Filed 2001·Granted Apr 29, 2003·75 cites·38 claims
- 0895US7369223B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2005·Granted May 6, 2008·25 cites·5 claims
- 0993US7859656B2Defect inspection method and systemHITACHI HIGH TECH CORP·Filed 2009·Granted Dec 28, 2010·15 cites·18 claims
- 1093US4669875AForeign particle detecting method and apparatusHITACHI LTD·Filed 1983·Granted Jun 2, 1987·79 cites·20 claims
- 1192US8013989B2Defects inspecting apparatus and defects inspecting methodHITACHI HIGH TECH CORP·Filed 2010·Granted Sep 6, 2011·7 cites·16 claims
- 1292US7851753B2Method and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2006·Granted Dec 14, 2010·20 cites·15 claims
- 1391US7768635B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 3, 2010·10 cites·20 claims
- 1491US7492452B2Defect inspection method and systemHITACHI HIGH TECH CORP·Filed 2007·Granted Feb 17, 2009·13 cites·13 claims
- 1590US8218138B2Apparatus and method for inspecting defectsNAKANO HIROYUKI·Filed 2011·Granted Jul 10, 2012·7 cites·11 claims
- 1689US9976966B2Defect inspection method and its deviceHITACHI HIGH TECH CORP·Filed 2016·Granted May 22, 2018·3 cites·4 claims
- 1789US7326623B2Method of manufacturing display deviceHITACHI LTD·Filed 2005·Granted Feb 5, 2008·11 cites·17 claims
- 1888US7834353B2Method of manufacturing display deviceHITACHI DISPLAYS LTD·Filed 2008·Granted Nov 16, 2010·9 cites·4 claims
- 1988US6576559B2Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatusesHITACHI LTD·Filed 2002·Granted Jun 10, 2003·32 cites·22 claims
- 2087US7456963B2Method and equipment for detecting pattern defectHITACHI LTD·Filed 2006·Granted Nov 25, 2008·7 cites·6 claims
- 2187US7417721B2Defect detector and defect detecting methodHITACHI LTD·Filed 2003·Granted Aug 26, 2008·20 cites·21 claims
- 2287US6800859B1Method and equipment for detecting pattern defectHITACHI LTD·Filed 1999·Granted Oct 5, 2004·55 cites·27 claims
- 2386US8107065B2Method and apparatus for detecting defectsNAKANO HIROYUKI·Filed 2010·Granted Jan 31, 2012·4 cites·8 claims
- 2486US5135303AMethod of and apparatus for inspecting surface defectsHITACHI LTD·Filed 1991·Granted Aug 4, 1992·39 cites·14 claims
- 2586US4676637AExposure apparatus with foreign particle detectorHITACHI LTD·Filed 1985·Granted Jun 30, 1987·44 cites·9 claims
- 2685US7791725B2Method and equipment for detecting pattern defectHITACHI LTD·Filed 2008·Granted Sep 7, 2010·5 cites·10 claims
- 2785US7601954B2Method and apparatus for reviewing defectsHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 13, 2009·10 cites·16 claims
- 2885US7218389B2Method and apparatus for inspecting pattern defectsHITACHI LTD·Filed 2002·Granted May 15, 2007·24 cites·12 claims
- 2984US7315363B2Inspection method and inspection apparatusHITACHI HIGH TECH CORP·Filed 2003·Granted Jan 1, 2008·14 cites·8 claims
- 3084US7129124B2Display device, process of fabricating same, and apparatus for fabricating sameHITACHI DISPLAYS LTD·Filed 2003·Granted Oct 31, 2006·26 cites·6 claims
- 3182US7586594B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2007·Granted Sep 8, 2009·4 cites·6 claims
- 3282US6831737B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2002·Granted Dec 14, 2004·14 cites·24 claims
- 3381US9513228B2Defect inspection method and its deviceHITACHI HIGH TECH CORP·Filed 2012·Granted Dec 6, 2016·3 cites·20 claims
- 3481US7973920B2Apparatus and method for inspecting defectsHITACHI HIGH TECH CORP·Filed 2010·Granted Jul 5, 2011·3 cites·19 claims
- 3581US6943876B2Method and apparatus for detecting pattern defectsHITACHI LTD·Filed 2002·Granted Sep 13, 2005·17 cites·15 claims
- 3681US6721047B2Method and apparatus for inspecting defects of a specimenHITACHI LTD·Filed 2001·Granted Apr 13, 2004·18 cites·17 claims
- 3780US8975582B2Method and apparatus for reviewing defectsNISHIYAMA HIDETOSHI·Filed 2011·Granted Mar 10, 2015·3 cites·29 claims
- 3880US8508727B2Defects inspecting apparatus and defects inspecting methodUTO SACHIO·Filed 2012·Granted Aug 13, 2013·2 cites·18 claims
- 3980US7903244B2Method for inspecting defect and apparatus for inspecting defectHITACHI HIGH TECH CORP·Filed 2009·Granted Mar 8, 2011·3 cites·2 claims
- 4080US7453561B2Method and apparatus for inspecting foreign particle defectsHITACHI HIGH TECH CORP·Filed 2006·Granted Nov 18, 2008·5 cites·7 claims
- 4180US7081953B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2004·Granted Jul 25, 2006·11 cites·10 claims
- 4279US8467048B2Pattern defect inspection apparatus and methodNISHIYAMA HIDETOSHI·Filed 2012·Granted Jun 18, 2013·2 cites·15 claims
- 4379US8289507B2Method of apparatus for detecting particles on a specimenHAMAMATSU AKIRA·Filed 2011·Granted Oct 16, 2012·2 cites·12 claims
- 4479US7817261B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2008·Granted Oct 19, 2010·4 cites·14 claims
- 4579US7746453B2Pattern defect inspection apparatus and methodHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 29, 2010·4 cites·14 claims
- 4679US6819416B2Defect inspection method and apparatus thereforHITACHI LTD·Filed 2002·Granted Nov 16, 2004·12 cites·22 claims
- 4779US4922308AMethod of and apparatus for detecting foreign substanceHITACHI LTD·Filed 1987·Granted May 1, 1990·43 cites·12 claims
- 4878US7952700B2Method of apparatus for detecting particles on a specimenHITACHI HIGH TECH CORP·Filed 2010·Granted May 31, 2011·2 cites·12 claims
- 4978US7911601B2Apparatus and method for inspecting patternHITACHI LTD·Filed 2008·Granted Mar 22, 2011·3 cites·8 claims
- 5078US7768634B2Defects inspecting apparatus and defects inspecting methodHITACHI HIGH TECH CORP·Filed 2008·Granted Aug 3, 2010·3 cites·16 claims
Showing the top 50 of 85 patent records by PatentIndex Score.
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