Inventor · disambiguated record
Scott Anderson
Also filed as: ANDERSON SCOTT · ANDERSON SCOTT A · ANDERSON SCOTT ALAN
5 granted patents·5 pending applications·33 citations·filing 2004–2013
75Inventor score
Top patents by PatentIndex Score
10 records- 0192US7846848B2Cluster tool with integrated metrology chamber for transparent substratesAPPLIED MATERIALS INC·Filed 2006·Granted Dec 7, 2010·25 cites·18 claims
- 0274US7879510B2Method for quartz photomask plasma etchingAPPLIED MATERIALS INC·Filed 2005·Granted Feb 1, 2011·4 cites·13 claims
- 0369US7786019B2Multi-step photomask etching with chlorine for uniformity controlAPPLIED MATERIALS INC·Filed 2006·Granted Aug 31, 2010·3 cites·29 claims
- 0461US7635546B2Phase shifting photomask and a method of fabricating thereofAPPLIED MATERIALS INC·Filed 2007·Granted Dec 22, 2009·1 cites·10 claims
- 0557US2014190632A1Method and apparatus for photomask plasma etchingAPPLIED MATERIALS INC·Filed 2013·Application pending·0 cites
- 0652US2007017898A1Method and apparatus for photomask plasma etchingKUMAR AJAY·Filed 2006·Application pending·0 cites
- 0745US2006000802A1Method and apparatus for photomask plasma etchingKUMAR AJAY·Filed 2004·Application pending·0 cites
- 0844US2006154388A1Integrated metrology chamber for transparent substratesLEWINGTON RICHARD·Filed 2005·Application pending·0 cites
- 0942US2008099451A1Workpiece rotation apparatus for a plasma reactor systemLEWINGTON RICHARD·Filed 2006·Application pending·0 cites
- 1032US8580935B2Ultra-fast chromatographyNGUYEN RENO T·Filed 2008·Granted Nov 12, 2013·0 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →