Inventor · disambiguated record
Scott Briggs
Also filed as: BRIGGS SCOTT · BRIGGS SCOTT M
6 granted patents·2 pending applications·74 citations·filing 2002–2022
79Inventor score
Top patents by PatentIndex Score
8 records- 0195US9673058B1Method for etching features in dielectric layersLAM RES CORP·Filed 2016·Granted Jun 6, 2017·24 cites·17 claims
- 0284US6930048B1Etching a metal hard mask for an integrated circuit structureLAM RES CORP·Filed 2002·Granted Aug 16, 2005·43 cites·32 claims
- 0361US8708134B2Star wheel conveyor outfeed mechanism and methodBRIGGS SCOTT M·Filed 2011·Granted Apr 29, 2014·5 cites·14 claims
- 0453US11935730B2Systems and methods for cleaning an edge ring pocketLAM RES CORP·Filed 2020·Granted Mar 19, 2024·0 cites·20 claims
- 0552US2025246413A1Coated part for plasma processing chamberLAM RES CORP·Filed 2022·Application pending·0 cites
- 0646US2023071249A1Etching and plasma uniformity control using magneticsLAM RES CORP·Filed 2021·Application pending·0 cites
- 0745US8548771B2Out-of-round container detection system and methodHOLDEN CARL L·Filed 2008·Granted Oct 1, 2013·2 cites·17 claims
- 0842US7544521B1Negative bias critical dimension trimLAM RES CORP·Filed 2006·Granted Jun 9, 2009·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →